We experimentally demonstrate a low-cost transfer process of GeSn ribbons to insulating substrates for short-wave infrared (SWIR) sensing/imaging applications. By releasing the original compressive GeSn layer to nearly fully relaxed state GeSn ribbons, the room-temperature spectral response of the photodetector is further extended to 3.2 μm, which can cover the entire SWIR range. Compared with the as-grown GeSn reference photodetectors, the fabricated GeSn ribbon photodetectors have a fivefold improvement in the light-to-dark current ratio, which can improve the detectivity for high-performance photodetection. The transient performance of a GeSn ribbon photodetector is investigated with a rise time of about 40 μs, which exceeds the response time of most GeSn (Ge)-related devices. In addition, this transfer process can be applied on various substrates, making it a versatile technology that can be used for various applications ranging from optoelectronics to large-area electronics. These results provide insightful guidance for the development of low-cost and high-speed SWIR photodetectors based on Sn-containing group IV low-dimensional structures.
Skip Nav Destination
Article navigation
July 2024
Research Article|
June 12 2024
Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications
Special Collection:
Developing SiGeSn Technology: Materials and Devices
Haochen Zhao
;
Haochen Zhao
(Data curation, Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – original draft)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Suho Park;
Suho Park
(Conceptualization, Methodology, Writing – review & editing)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Guangyang Lin;
Guangyang Lin
(Investigation, Methodology)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Yuying Zhang
;
Yuying Zhang
(Methodology)
2
Department of Materials Science and Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Tuofu Zhama;
Tuofu Zhama
(Methodology)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Chandan Samanta
;
Chandan Samanta
(Methodology)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Lorry Chang
;
Lorry Chang
(Methodology)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Xiaofeng Zhu
;
Xiaofeng Zhu
(Methodology)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Xu Feng;
Xu Feng
(Methodology)
3
Surface Analysis Facility, University of Delaware
, Newark, Delaware 19716
Search for other works by this author on:
Kevin O. Díaz-Aponte
;
Kevin O. Díaz-Aponte
(Methodology)
4
Department of Physics and Engineering, Delaware State University
, Dover, Delaware 19901
Search for other works by this author on:
Lin Cong
;
Lin Cong
(Methodology)
4
Department of Physics and Engineering, Delaware State University
, Dover, Delaware 19901
Search for other works by this author on:
Yuping Zeng
Yuping Zeng
a)
(Conceptualization, Funding acquisition, Methodology, Project administration, Supervision, Writing – review & editing)
1
Department of Electrical and Computer Engineering, University of Delaware
, Newark, Delaware 19716a)Author to whom correspondence should be addressed: yzeng@udel.edu
Search for other works by this author on:
a)Author to whom correspondence should be addressed: yzeng@udel.edu
J. Vac. Sci. Technol. B 42, 042205 (2024)
Article history
Received:
February 20 2024
Accepted:
May 15 2024
Citation
Haochen Zhao, Suho Park, Guangyang Lin, Yuying Zhang, Tuofu Zhama, Chandan Samanta, Lorry Chang, Xiaofeng Zhu, Xu Feng, Kevin O. Díaz-Aponte, Lin Cong, Yuping Zeng; Transferable GeSn ribbon photodetectors for high-speed short-wave infrared photonic applications. J. Vac. Sci. Technol. B 1 July 2024; 42 (4): 042205. https://doi.org/10.1116/6.0003561
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Pay-Per-View Access
$40.00
244
Views
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
A. S. Stodolna, T. W. Mechielsen, et al.
High-efficiency metalenses for zone-plate-array lithography
Henry I. Smith, Mark Mondol, et al.