Most in situ plasma diagnostics are only reliable for low-pressure systems, e.g., systems where the collision frequency, ν e n, is small compared to the plasma frequency, ω p e. In this article, we describe a novel diagnostic technique for simultaneous measurement of the plasma density, n e; electron temperature, T e; and ν e n in systems in which ν e n approaches ω p e. We illustrate the operational setup of our probe system along with an analytical framework for ascertaining n e, T e, and ν e n. Furthermore, we show experimental results from argon capacitively coupled plasma operating in the 0.5–1 Torr pressure range.

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