The effect of varying threading dislocation densities on the internal quantum efficiencies (IQEs) of InGaN quantum wells (QWs), with and without intentionally created “V-pits,” is reported here. InGaN QW samples grown on GaN-on-sapphire templates with threading dislocation densities of <1 × 108 and <1 × 109 cm−2 are compared, with and without GaN/InGaN superlattice (SL) layers incorporated to intentionally open up the threading dislocation cores and form large-size “V-pits.” The formation of “V-pits” is confirmed by cross-sectional transmission electron microscopy to initiate from threading dislocations in the SL layers. The densities of the pits are confirmed by plan-view SEM to agree with the substrate threading dislocation densities. The experimental room temperature IQEs of the “V-pit” QW samples are enhanced to 15% ± 1% compared to 6% ± 2% for conventional QW samples. Both conventional and “V-pit” samples show insensitivity to the magnitude of the dislocation densities with respect to IQE performance, while the “V-pit” samples show shifts in the peak emission wavelengths compared to the conventional samples, attributed to strain modulation. This study provides additional understanding of the causes of the observed insensitivity of the IQEs to different threading dislocation densities.
Skip Nav Destination
,
,
,
,
,
,
,
,
Article navigation
November 2023
Research Article|
November 16 2023
Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits Available to Purchase
Special Collection:
55 Years of Metalorganic Chemical Vapor Deposition (MOCVD)
Kaitian Zhang
;
Kaitian Zhang
(Data curation, Formal analysis, Investigation, Validation, Visualization, Writing – original draft)
1
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Chenxi Hu
;
Chenxi Hu
(Investigation, Methodology, Visualization, Writing – original draft)
2
Department of Physics, Case Western Reserve University
, Cleveland, Ohio 44106
Search for other works by this author on:
Vijay Gopal Thirupakuzi Vangipuram
;
Vijay Gopal Thirupakuzi Vangipuram
(Investigation, Visualization)
1
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Lingyu Meng
;
Lingyu Meng
(Formal analysis, Investigation, Methodology)
1
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Christopher Chae;
Christopher Chae
(Investigation, Methodology, Writing – original draft)
3
Department of Materials Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Menglin Zhu;
Menglin Zhu
(Investigation, Methodology)
3
Department of Materials Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Jinwoo Hwang
;
Jinwoo Hwang
(Investigation, Visualization)
3
Department of Materials Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Kathleen Kash
;
Kathleen Kash
(Formal analysis, Investigation, Methodology, Supervision, Writing – original draft, Writing – review & editing)
2
Department of Physics, Case Western Reserve University
, Cleveland, Ohio 44106
Search for other works by this author on:
Hongping Zhao
Hongping Zhao
a)
(Conceptualization, Formal analysis, Funding acquisition, Investigation, Methodology, Project administration, Supervision, Validation, Writing – original draft, Writing – review & editing)
1
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 432103
Department of Materials Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
Search for other works by this author on:
Kaitian Zhang
1
Chenxi Hu
2
Vijay Gopal Thirupakuzi Vangipuram
1
Lingyu Meng
1
Christopher Chae
3
Menglin Zhu
3
Jinwoo Hwang
3
Kathleen Kash
2
Hongping Zhao
1,3,a)
1
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
2
Department of Physics, Case Western Reserve University
, Cleveland, Ohio 44106
3
Department of Materials Science and Engineering, The Ohio State University
, Columbus, Ohio 43210a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 41, 062207 (2023)
Article history
Received:
September 14 2023
Accepted:
October 27 2023
Citation
Kaitian Zhang, Chenxi Hu, Vijay Gopal Thirupakuzi Vangipuram, Lingyu Meng, Christopher Chae, Menglin Zhu, Jinwoo Hwang, Kathleen Kash, Hongping Zhao; Effect of varying threading dislocation densities on the optical properties of InGaN/GaN quantum wells with intentionally created V-shaped pits. J. Vac. Sci. Technol. B 1 November 2023; 41 (6): 062207. https://doi.org/10.1116/6.0003141
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning
Yasser Pordeli, Céline Steenge, et al.
Heating of photocathode via field emission and radiofrequency pulsed heating: Implication toward breakdown
Ryo Shinohara, Soumendu Bagchi, et al.
Related Content
Graded buffer Bragg reflectors with high reflectivity and transparency for metamorphic optoelectronics
J. Appl. Phys. (May 2021)
Optical properties of Ga-doped AlN nanowires
Appl. Phys. Lett. (March 2023)
Semipolar { n n ¯ 01 } InGaN/GaN ridge quantum wells (n = 1−3) fabricated by a regrowth technique
Appl. Phys. Lett. (April 2012)
Design of InGaN-ZnSnGa2N4 quantum wells for high-efficiency amber light emitting diodes
J. Vac. Sci. Technol. A (April 2023)
High power and high efficiency blue light emitting diode on freestanding semipolar ( 10 1 ¯ 1 ¯ ) bulk GaN substrate
Appl. Phys. Lett. (June 2007)