Normally off AlGaN/GaN high electron mobility transistors (HEMTs) with p-type gates are attracting increasing attention due to their high safety and low power loss in the field of power switching. In this work, to solve the Mg difficult activating problem of the conventional p-GaN gate AlGaN/GaN HEMTs, we propose an advanced design for the normally off AlGaN/GaN HEMT with a p-type hexagonal boron nitride (h-BN) gate cap layer to effectively manipulate the channel transport of the device. The simulation results demonstrate that the p-hBN gate cap HEMTs yield superior performance over conventional p-GaN gate HEMTs in terms of output current and breakdown voltage, which can be attributed to the deeper potential well formation at the AlGaN/GaN interface and more accumulation of holes located at the p-hBN/AlGaN interface. Moreover, we investigate the effect of bandgap variation on device performance, taking into account that the exact bandgap of h-BN remains under debate. Herein, valuable insights into h-BN cap-gate E-mode AlGaN/GaN HEMT devices are provided, which could serve as a useful reference for the future development of robust III-nitride material power electronic devices.
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High-performance normally off AlGaN/GaN high electron mobility transistor with p-type h-BN cap layer
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December 2023
Research Article|
October 20 2023
High-performance normally off AlGaN/GaN high electron mobility transistor with p-type h-BN cap layer
Nan Wang
;
Nan Wang
(Data curation, Investigation, Writing – original draft, Writing – review & editing)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Haiping Wang
;
Haiping Wang
(Writing – review & editing)
2
School of Electronic Science and Engineering, Nanjing University
, Nanjing 210023, China
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Zhuokun He;
Zhuokun He
(Investigation)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Xiaohui Gao;
Xiaohui Gao
(Investigation)
2
School of Electronic Science and Engineering, Nanjing University
, Nanjing 210023, China
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Dunjun Chen
;
Dunjun Chen
(Validation, Writing – review & editing)
2
School of Electronic Science and Engineering, Nanjing University
, Nanjing 210023, China
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Yukun Wang
;
Yukun Wang
(Investigation)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Haoran Ding;
Haoran Ding
(Investigation)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Yufei Yang;
Yufei Yang
(Investigation)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Qianyu Hou
;
Qianyu Hou
a)
(Funding acquisition, Writing – review & editing)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
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Wenhong Sun
Wenhong Sun
a)
(Funding acquisition, Resources)
1
Research Center for Optoelectronic Materials and Devices, School of Physical Sciences and Technology, Guangxi University
, Nanning 530004, China
3
Guangxi Key Laboratory of Processing for Non-ferrous Metallic and Featured Materials, School of Resources
, Environment and Materials, Nanning 530004, China
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J. Vac. Sci. Technol. B 41, 062203 (2023)
Article history
Received:
August 03 2023
Accepted:
September 27 2023
Citation
Nan Wang, Haiping Wang, Zhuokun He, Xiaohui Gao, Dunjun Chen, Yukun Wang, Haoran Ding, Yufei Yang, Qianyu Hou, Wenhong Sun; High-performance normally off AlGaN/GaN high electron mobility transistor with p-type h-BN cap layer. J. Vac. Sci. Technol. B 1 December 2023; 41 (6): 062203. https://doi.org/10.1116/5.0169900
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