The narrow structure within the vacuum system usually results in a slow evacuation process. Additionally, the high outgassing rate caused by the large surface-to-volume ratio can prevent the vacuum level from meeting the performance requirements of the device. In this paper, the evacuation of the stainless steel parallel plates is established based on a two-dimensional equation combined with the outgassing theory of the recombination–dissociation-limited model. The relationship between the measured and intrinsic outgassing rates was investigated by varying the gap size, pump-out port size, and temperature. The results show that the internal pressure is nonuniformly distributed during the pump-down process, even reaching a quasiequilibrium state. This indicates that the widely used throughput method can make a difference in measuring outgassing rates. This provides a theoretical basis for testing intrinsic outgassing rates, calculating pressure distribution, and configuring pumps or getters in complex vacuum systems.
Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect
Zhengwei Mei, Hailin Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang; Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect. J. Vac. Sci. Technol. B 1 September 2023; 41 (5): 054202. https://doi.org/10.1116/6.0002906
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