The narrow structure within the vacuum system usually results in a slow evacuation process. Additionally, the high outgassing rate caused by the large surface-to-volume ratio can prevent the vacuum level from meeting the performance requirements of the device. In this paper, the evacuation of the stainless steel parallel plates is established based on a two-dimensional equation combined with the outgassing theory of the recombination–dissociation-limited model. The relationship between the measured and intrinsic outgassing rates was investigated by varying the gap size, pump-out port size, and temperature. The results show that the internal pressure is nonuniformly distributed during the pump-down process, even reaching a quasiequilibrium state. This indicates that the widely used throughput method can make a difference in measuring outgassing rates. This provides a theoretical basis for testing intrinsic outgassing rates, calculating pressure distribution, and configuring pumps or getters in complex vacuum systems.
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September 2023
Research Article|
September 05 2023
Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect
Zhengwei Mei
;
Zhengwei Mei
(Data curation, Investigation, Writing – original draft)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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Hailin Bi
;
Hailin Bi
(Methodology)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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Qing Cao
;
Qing Cao
(Writing – review & editing)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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Yuqing Wang;
Yuqing Wang
(Writing – review & editing)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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Wenyu Lin
;
Wenyu Lin
(Software)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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Junfeng Ye
;
Junfeng Ye
(Software)
Hefei University of Technology, School of Mechanical Engineering
, Hefei 230009, China
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a)
Electronic mail: wxudi@hfut.edu.cn
J. Vac. Sci. Technol. B 41, 054202 (2023)
Article history
Received:
June 26 2023
Accepted:
July 31 2023
Citation
Zhengwei Mei, Hailin Bi, Qing Cao, Yuqing Wang, Wenyu Lin, Junfeng Ye, Xudi Wang; Investigation of the intrinsic outgassing rates for narrow structured vacuum devices under readsorption effect. J. Vac. Sci. Technol. B 1 September 2023; 41 (5): 054202. https://doi.org/10.1116/6.0002906
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