In near-ambient-pressure photoelectron spectroscopy, the photoelectron intensity is assumed to follow the Beer-Lambert law, that is, the intensity decreases exponentially with distance d between the sample and the aperture cone. In this study, the gas pressure dependence of photoelectron intensity is systematically studied in a wide range of d values from 0.3 up to 5 mm. The experimental results were reproduced by replacing d with d + do (do is a constant) in the Beer-Lambert law. The do value was evaluated as ∼1 mm, which is considerably larger than the normal d value of 0.3 mm. Fluid dynamics simulation results obtained using a structural model with a size close to that of the actual differential pumping system suggested that the residual gas in the long pumping path caused a large do value.
Skip Nav Destination
,
,
,
,
Article navigation
July 2023
Research Article|
June 21 2023
Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy
Kento Takenaka;
Kento Takenaka
(Investigation, Software)
1
Graduate School of Science, University of Hyogo
, 3-2-1, Koto, Kamigori, Ako, Hyogo 678-1297, Japan
Search for other works by this author on:
Koji Takahara;
Koji Takahara
(Investigation)
2
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
, 3-1-2, Koto, Kamigori, Ako, Hyogo 678-1205, Japan
Search for other works by this author on:
Tomoki Eguchi;
Tomoki Eguchi
(Investigation)
2
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
, 3-1-2, Koto, Kamigori, Ako, Hyogo 678-1205, Japan
Search for other works by this author on:
Hirosuke Sumida
;
Hirosuke Sumida
(Project administration)
3
Mazda Motor Corp.
, 3-1, Shinchi, Fuchu, Aki, Hiroshima 730-8670, Japan
Search for other works by this author on:
Satoru Suzuki
Satoru Suzuki
a)
(Supervision, Writing – original draft)
2
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
, 3-1-2, Koto, Kamigori, Ako, Hyogo 678-1205, Japan
Search for other works by this author on:
Kento Takenaka
1
Koji Takahara
2
Tomoki Eguchi
2
Hirosuke Sumida
3
Satoru Suzuki
2,a)
1
Graduate School of Science, University of Hyogo
, 3-2-1, Koto, Kamigori, Ako, Hyogo 678-1297, Japan
2
Laboratory of Advanced Science and Technology for Industry, University of Hyogo
, 3-1-2, Koto, Kamigori, Ako, Hyogo 678-1205, Japan
3
Mazda Motor Corp.
, 3-1, Shinchi, Fuchu, Aki, Hiroshima 730-8670, Japan
a)
Electronic mail: [email protected]
Note: This paper is a part of the Special Topic Collection: Papers from the 14th International Symposium on Atomic Level Characterizations for New Materials and Devices (ALC 22).
J. Vac. Sci. Technol. B 41, 044204 (2023)
Article history
Received:
March 10 2023
Accepted:
June 06 2023
Citation
Kento Takenaka, Koji Takahara, Tomoki Eguchi, Hirosuke Sumida, Satoru Suzuki; Deviation of photoelectron intensity from Beer-Lambert law in near-ambient pressure hard x-ray photoelectron spectroscopy. J. Vac. Sci. Technol. B 1 July 2023; 41 (4): 044204. https://doi.org/10.1116/6.0002662
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Science challenges and research opportunities for plasma applications in microelectronics
David B. Graves, Catherine B. Labelle, et al.
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
A. S. Stodolna, T. W. Mechielsen, et al.
Related Content
Enhanced photocathode performance through optimization of film thickness and substrate
J. Vac. Sci. Technol. B (February 2017)
Measurement of carbon film thickness by inelastic electron scatter
J. Vac. Sci. Technol. A (September 2001)
Thermo-kinetic curing model for stereolithographic applications
AIP Conf. Proc. (September 2012)
Electron scattering from 1-butanol at intermediate impact energies: Total cross sections
J. Chem. Phys. (May 2019)
Experimental and numerical investigation of beer foam
Physics of Fluids (February 2023)