The mechanism of vacuum discharge of a multitip field cathode based on carbon nanotubes has been studied. The analysis was carried out using a multichannel field emission information collection system, a computerized field projector, and a program for recording and cyclic playback of the experimental results. The discharge under study occurred in the regime of a relatively stable emission current without an increase in the external voltage level. The time dependences of the local currents of all individual emission sites registered on the cathode surface were obtained. It is shown that the discharge consists of several successive phases, the key of which are an explosion in the region of one of the most active carbon nanotubes and a plasma torch above it. The effect of the discharge on neighboring nanotubes, which is associated with both the destruction of emission sites and their appearance, is also described.
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Research Article|
April 17 2023
Vacuum discharge analysis of CNT field cathode using a computerized field projector
Special Collection:
Vacuum Nanoelectronics
Anatoly G. Kolosko
;
Anatoly G. Kolosko
a)
(Conceptualization, Data curation, Investigation, Methodology, Software, Visualization, Writing – original draft)
Ioffe Institute
, 26 Politekhnicheskaya, St. Petersburg 194021, Russian Federation
a)Author to whom correspondence should be addressed: agkolosko@mail.ru
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Sergey V. Filippov
;
Sergey V. Filippov
(Data curation, Investigation, Methodology, Validation, Writing – review & editing)
Ioffe Institute
, 26 Politekhnicheskaya, St. Petersburg 194021, Russian Federation
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Eugeni O. Popov
Eugeni O. Popov
(Data curation, Investigation, Methodology, Supervision, Writing – review & editing)
Ioffe Institute
, 26 Politekhnicheskaya, St. Petersburg 194021, Russian Federation
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a)Author to whom correspondence should be addressed: agkolosko@mail.ru
Note: This paper is a part of the 2023 Special Topic Collection on Vacuum Nanoelectronics.
J. Vac. Sci. Technol. B 41, 032801 (2023)
Article history
Received:
January 23 2023
Accepted:
March 31 2023
Citation
Anatoly G. Kolosko, Sergey V. Filippov, Eugeni O. Popov; Vacuum discharge analysis of CNT field cathode using a computerized field projector. J. Vac. Sci. Technol. B 1 May 2023; 41 (3): 032801. https://doi.org/10.1116/6.0002514
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