A simple physical metal mask is efficiently employed to obtain an array of silicon (Si) nanowires (Si-NWs) on a Si substrate grown using the hot filament chemical vapor deposition route. Well adhered and uniform coating of different thicknesses (20 and 50 nm) of lanthanum hexaboride (LaB6) on Si-NWs was obtained using electron beam evaporation technique. The thickness of LaB6 coating was estimated from ellipsometry measurement. Structural, morphological, and chemical properties of the LaB6 coated Si-NWs (LaB6@Si-NWs) arrays were revealed using x-ray diffraction, field emission scanning electron microscope, transmission electron microscope, Raman spectroscopy, and x-ray photoelectron spectroscopy. Field electron emission characteristics of pristine Si-NW array and LaB6 coated Si-NWs array emitters were studied in planar diode configuration at a base pressure of 1 × 10−8 mbar. The values of turn-on field (current density ∼1 μA/cm2) were observed as ∼2.2, 1.2, and 1.6 V/μm for pristine Si-NWs, LaB6@Si-NWs_20, and LaB6@Si-NWs_50 array emitters, respectively. Furthermore, maximum emission current densities of ∼1276.81, 2763.64, and 2231.81 μA/cm2 have been extracted from the pristine Si-NWs, LaB6@Si-NWS_20, and LaB6@Si-NWS_50 array emitters at an applied field of 3.1, 2.7, and 2.7 V/μm, respectively. The LaB6@Si-NWS_20 array emitter demonstrated superior FEE properties as compared to the pristine Si-NWs and LaB6@Si-NWS_50 emitters. Furthermore, LaB6@Si-NWS_20 emitter depicted very good emission current stability tested at a preset value of 1 μA over a duration of 3 h. The enhanced FEE performance exhibited by the LaB6@Si-NWs_20 array emitter is attributed to reduction in effective work function and enhanced electron tunneling probability across the LaB6–Si interface.
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March 2023
Research Article|
March 23 2023
Thickness dependent field emission study of LaB6 coated Si nanowire arrays
Special Collection:
Vacuum Nanoelectronics
Amol Deore
;
Amol Deore
(Conceptualization, Data curation, Investigation, Methodology, Validation, Writing – original draft)
1
Centre for Advanced Studies in Material Science and Condensed Matter Physics, Department of Physics, Savitribai Phule Pune University
, Pune 411007, India
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Krishna Jagtap
;
Krishna Jagtap
(Formal analysis)
1
Centre for Advanced Studies in Material Science and Condensed Matter Physics, Department of Physics, Savitribai Phule Pune University
, Pune 411007, India
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Onkar Bhorade
;
Onkar Bhorade
(Formal analysis)
2
Groupe de Physique des Matriaux, Normandie Universit, UNIROUEN, INSA Rouen, CNRS
, Rouen, 76000, France
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Angela Vella
;
Angela Vella
(Formal analysis)
2
Groupe de Physique des Matriaux, Normandie Universit, UNIROUEN, INSA Rouen, CNRS
, Rouen, 76000, France
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Mahendra More
Mahendra More
a)
(Project administration, Supervision, Validation, Writing – original draft, Writing – review & editing)
1
Centre for Advanced Studies in Material Science and Condensed Matter Physics, Department of Physics, Savitribai Phule Pune University
, Pune 411007, India
a)Author to whom correspondence should be addressed: mam@physics.unipune.ac.in
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a)Author to whom correspondence should be addressed: mam@physics.unipune.ac.in
Note: This paper is a part of the 2023 Special Topic Collection on Vacuum Nanoelectronics.
J. Vac. Sci. Technol. B 41, 022806 (2023)
Article history
Received:
December 29 2022
Accepted:
March 01 2023
Citation
Amol Deore, Krishna Jagtap, Onkar Bhorade, Angela Vella, Mahendra More; Thickness dependent field emission study of LaB6 coated Si nanowire arrays. J. Vac. Sci. Technol. B 1 March 2023; 41 (2): 022806. https://doi.org/10.1116/6.0002464
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