Next to powders, inks, and microelectronics, many technologies that carry the attribute nano in their name are still waiting for their breakthrough and wide acceptance in engineering and industry. At least nanofabrication technologies are the subject of a vivid track in research and development in a variety of scientific fields but yet most of them are mainly invisible in everyday products. This paper aims to describe three inspiring examples of research work in the area of nanopatterning and systems integration at the micro-nano interface to motivate applications with new and unprecedented functionalities. The application examples comprise the fields of bio-inspired computing, optoelectronic sensing, and spectral imaging. First, network-based biocomputing uses biological agents in a nanopatterned fluidic channel system and opens horizons for energy-efficient solutions to complex mathematical problems. Second, nanoelectronic devices based on carbon nanotubes (CNTs) have emerged because of the outstanding mechanical, electronic, and optical properties of the CNTs. The adaptivity of nanostructures to the world of biological molecules and other nanoscopic building blocks such as quantum dots and nanoparticles enables novel, even personalized, devices and technical solutions. Third, early-on “nano” fame has been devoted to optical effects—the authors here discuss an advanced integrated micro-opto-mechanical system on a micromirror plate forming a Fabry–Pérot Interferometer.
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December 2021
Research Article|
November 03 2021
Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research
Mario Baum;
Mario Baum
a
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
aAuthor to whom correspondence should be addressed: [email protected]
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Christoph Meinecke;
Christoph Meinecke
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Thomas Blaudeck;
Thomas Blaudeck
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
3
Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Christian Helke;
Christian Helke
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Danny Reuter;
Danny Reuter
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Karla Hiller;
Karla Hiller
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
3
Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Sascha Hermann;
Sascha Hermann
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
3
Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Stefan E. Schulz;
Stefan E. Schulz
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
3
Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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Harald Kuhn
Harald Kuhn
1
Fraunhofer Institute for Electronic Nano Systems (ENAS)
, 09126 Chemnitz, Saxony, Germany
2
Center for Microtechnologies (ZfM), Chemnitz University of Technology
, 09107 Chemnitz, Saxony, Germany
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aAuthor to whom correspondence should be addressed: [email protected]
Note: This paper is part of the Special Collection: 64th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication, EIPBN 2021.
J. Vac. Sci. Technol. B 39, 062805 (2021)
Article history
Received:
July 17 2021
Accepted:
September 13 2021
Citation
Mario Baum, Christoph Meinecke, Thomas Blaudeck, Christian Helke, Danny Reuter, Karla Hiller, Sascha Hermann, Stefan E. Schulz, Harald Kuhn; Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research. J. Vac. Sci. Technol. B 1 December 2021; 39 (6): 062805. https://doi.org/10.1116/6.0001299
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