Enhanced thermionic emission (TE) and conversion characteristics are observed by controlling spontaneous and piezoelectric polarization and the band diagram of n-type AlGaN/GaN thermionic cathodes. Reduction in the electron affinity and work function by the insertion of an N-polarity thin n-type AlGaN (n-AlGaN) film including tensile biaxial strain is confirmed by an ultraviolet photoemission spectroscopy analysis. The obtained TE current from N-polarity n-AlGaN films grown on an n-type GaN (n-GaN) substrate is 0.29 mA at 500 °C in a Cs gas atmosphere in the vacuum gap between the cathode and a stainless steel anode. This TE current is 5.0 times and 1.6 times higher than that from the surface of Ga-polarity n-GaN substrate and that of the Ga-polarity n-AlGaN film on the substrate, respectively.
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December 2021
Research Article|
November 01 2021
Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes
Special Collection:
Vacuum Nanoelectronics
Shigeya Kimura
;
Shigeya Kimura
a)
1
Corporate Research and Development Center, Toshiba Corporation
, 1 Komukai-Toshiba-cho, Saiwai-ku, Kawasaki, Kanagawa 212-8582, Japan
a)Author to whom correspondence should be addressed: shigeya.kimura@toshiba.co.jp
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Hisashi Yoshida;
Hisashi Yoshida
1
Corporate Research and Development Center, Toshiba Corporation
, 1 Komukai-Toshiba-cho, Saiwai-ku, Kawasaki, Kanagawa 212-8582, Japan
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Hisao Miyazaki;
Hisao Miyazaki
1
Corporate Research and Development Center, Toshiba Corporation
, 1 Komukai-Toshiba-cho, Saiwai-ku, Kawasaki, Kanagawa 212-8582, Japan
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Takuya Fujimoto;
Takuya Fujimoto
2
Graduate School of Integrated Science and Technology, Shizuoka University
, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8561, Japan
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Akihisa Ogino
Akihisa Ogino
2
Graduate School of Integrated Science and Technology, Shizuoka University
, 3-5-1 Johoku, Naka-ku, Hamamatsu, Shizuoka 432-8561, Japan
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a)Author to whom correspondence should be addressed: shigeya.kimura@toshiba.co.jp
Note: This paper is a part of the Special Topic Collection on Vacuum Nanoelectronics.
J. Vac. Sci. Technol. B 39, 062207 (2021)
Article history
Received:
August 13 2021
Accepted:
October 13 2021
Citation
Shigeya Kimura, Hisashi Yoshida, Hisao Miyazaki, Takuya Fujimoto, Akihisa Ogino; Enhancement of thermionic emission and conversion characteristics using polarization- and band-engineered n-type AlGaN/GaN cathodes. J. Vac. Sci. Technol. B 1 December 2021; 39 (6): 062207. https://doi.org/10.1116/6.0001357
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