We report the results of the design, simulation, fabrication, and cold-test measurements of millimeter-band 2D planar microstrip slow-wave structures (SWSs) on dielectric substrates. Such structures have a high slow-wave factor, which allows for low-voltage operation and reduction in the size and weight of the device. A low-cost and flexible fabrication technology based on magnetron sputtering and subsequent laser ablation has been developed and is reported in the paper. Microstrip meander-line SWS circuits at V-, W-, and D-bands have been fabricated and characterized. The fabrication of ring-bar planar SWSs by the photolithographic method is also discussed. Experimental measurement of S-parameters of the fabricated structures reveals good transmission properties. Return loss (S11) does not exceed −10 dB and attenuation is about 2 dB/cm in the V-band, 10 dB/cm in the W-band, and 8.5 dB/cm in the D-band.
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January 2021
Research Article|
January 22 2021
Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes
Nikita M. Ryskin
;
Nikita M. Ryskin
a)
1
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS
, 38 Zelenaya St., Saratov 410012, Russia
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Roman A. Torgashov
;
Roman A. Torgashov
1
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS
, 38 Zelenaya St., Saratov 410012, Russia
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Andrey V. Starodubov
;
Andrey V. Starodubov
1
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS
, 38 Zelenaya St., Saratov 410012, Russia
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Andrey G. Rozhnev
;
Andrey G. Rozhnev
1
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS
, 38 Zelenaya St., Saratov 410012, Russia
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Alexey A. Serdobintsev
;
Alexey A. Serdobintsev
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Anton M. Pavlov
;
Anton M. Pavlov
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Viktor V. Galushka;
Viktor V. Galushka
1
Saratov Branch, Kotelnikov Institute of Radio Engineering and Electronics RAS
, 38 Zelenaya St., Saratov 410012, Russia
2
Saratov State University
, 83 Astrakhanskaya St., Saratov 410019, Russia
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Dmitry A. Bessonov
;
Dmitry A. Bessonov
3
Saratov State Technical University
, 77 Politekhnicheskaya St., Saratov 410077, Russia
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Giacomo Ulisse
;
Giacomo Ulisse
4
Goethe University Frankfurt Am Main, Physics Institute
, 1 Max-von-Lauestr St., Frankfurt Am Main 60438, Germany
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Viktor Krozer
Viktor Krozer
4
Goethe University Frankfurt Am Main, Physics Institute
, 1 Max-von-Lauestr St., Frankfurt Am Main 60438, Germany
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a)
Electronic mail: RyskinNM@gmail.com
Note: This paper is part of the Special Collection Papers from the 33rd International Vacuum Nanoelectronics Conference (33rd IVNC 2020).
J. Vac. Sci. Technol. B 39, 013204 (2021)
Article history
Received:
October 14 2020
Accepted:
January 07 2021
Citation
Nikita M. Ryskin, Roman A. Torgashov, Andrey V. Starodubov, Andrey G. Rozhnev, Alexey A. Serdobintsev, Anton M. Pavlov, Viktor V. Galushka, Dmitry A. Bessonov, Giacomo Ulisse, Viktor Krozer; Development of microfabricated planar slow-wave structures on dielectric substrates for miniaturized millimeter-band traveling-wave tubes. J. Vac. Sci. Technol. B 1 January 2021; 39 (1): 013204. https://doi.org/10.1116/6.0000716
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