Fermi level pinning at Schottky barriers strongly limits the minimization of contact resistances in devices and thereby limits the scaling of modern Si electronic devices, so it is useful to understand the full range of behaviors of Schottky barriers. The authors find that some semiconductor interfaces with compound metals like silicides have apparently weaker Fermi level pinning. This occurs as these metals have an underlying covalent skeleton, whose interfaces with semiconductors lead to miscoordinated defect sites that create additional localized interface states that go beyond the standard metal-induced gap states (MIGSs) model of Schottky barriers. This causes a stronger dependence of Schottky barrier height on the metal and on interface orientation. These states are argued to be an additional component needed to extend the MIGS model.
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July 2020
Research Article|
July 21 2020
Extending the metal-induced gap state model of Schottky barriers
John Robertson;
John Robertson
a)
1
Department of Engineering, University of Cambridge
, Cambridge CB3 0FA, United Kingdom
2
School of Electrical Engineering and Automation, Wuhan University
, Wuhan 430072, China
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Yuzheng Guo
;
Yuzheng Guo
2
School of Electrical Engineering and Automation, Wuhan University
, Wuhan 430072, China
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Zhaofu Zhang
;
Zhaofu Zhang
1
Department of Engineering, University of Cambridge
, Cambridge CB3 0FA, United Kingdom
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Hongfei Li
Hongfei Li
1
Department of Engineering, University of Cambridge
, Cambridge CB3 0FA, United Kingdom
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a)
Electronic mail: jr@eng.cam.ac.uk
Note: This paper is part of the Special Topic Collection from the 47th Conference on the Physics and Chemistry of Surfaces and Interfaces (PCSI-47) 2020 meeting.
J. Vac. Sci. Technol. B 38, 042208 (2020)
Article history
Received:
March 02 2020
Accepted:
June 24 2020
Connected Content
A companion article has been published:
Extending the metal-induced gap state model to include silicides
Citation
John Robertson, Yuzheng Guo, Zhaofu Zhang, Hongfei Li; Extending the metal-induced gap state model of Schottky barriers. J. Vac. Sci. Technol. B 1 July 2020; 38 (4): 042208. https://doi.org/10.1116/6.0000164
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