A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase () and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure.
Vacuum-sealed field emission electron gun
Michael Bachmann, Felix Düsberg, Christoph Langer, Florian Herdl, Lukas Bergbreiter, Florian Dams, Natuski Miyakawa, Tobias Eggert, Andreas Pahlke, Simon Edler, Christian Prommesberger, Robert Ławrowski, Matthias Hausladen, Rupert Schreiner; Vacuum-sealed field emission electron gun. J. Vac. Sci. Technol. B 1 March 2020; 38 (2): 023203. https://doi.org/10.1116/1.5139316
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