Graphene is an ideal candidate for building microelectromechanical system (MEMS) devices because of its extraordinary electronic and mechanical properties. Some research has been done to study the MEMS pull-in phenomenon in suspended graphene, but no one has yet considered the effects of polymer residue. Polymer residue is an inevitable consequence when transferring polycrystalline graphene (PCG) grown using chemical vapor deposition, the most common graphene growth method. Polymer residue is also introduced when using photolithography to build MEMS devices. In this paper, the authors study the effects of polymer residue on the pull-in of suspended PCG ribbon devices and find that thick polymer residues cause a variation in pull-in voltage. However, after removing most of the polymer residue using a more abrasive chloroform treatment, the authors find that the graphene structure is no longer able to suspend itself as the graphene-substrate interaction energy becomes greater than the strain energy needed to conform graphene to the substrate. Therefore, polymer residue is found to cause variation in the pull-in voltage but is also found to help in graphene’s suspension at high length to displacement ratios.
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March 2020
Research Article|
March 17 2020
Effects of polymer residue on the pull-in of suspended graphene
Jimmy Ng;
Jimmy Ng
1
Department of Materials Science and Engineering, University of California Los Angeles
, 410 Westwood Plaza, 3111 Engineering V, Los Angeles, California 90095
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Talmage Jones
;
Talmage Jones
a)
2
Department of Mechanical and Aerospace Engineering, University of California Los Angeles
, 420 Westwood Plaza, 48-121 Engineering IV, Los Angeles, California 90095
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Isaac Martinez-Velis;
Isaac Martinez-Velis
3
Department of Electrical and Computer Engineering, University of California Los Angeles
, 420 Westwood Plaza, 56-125B Engineering IV, Los Angeles, California 90095
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Albert Wang;
Albert Wang
4
Department of Electrical and Computer Engineering, University of California Riverside
, 900 University Avenue, Suite 343 Winston Chung Hall, Riverside, California 92521
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Jonathan Hopkins
;
Jonathan Hopkins
2
Department of Mechanical and Aerospace Engineering, University of California Los Angeles
, 420 Westwood Plaza, 48-121 Engineering IV, Los Angeles, California 90095
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Ya-Hong Xie
Ya-Hong Xie
1
Department of Materials Science and Engineering, University of California Los Angeles
, 410 Westwood Plaza, 3111 Engineering V, Los Angeles, California 90095
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Jimmy Ng
1
Talmage Jones
2,a)
Isaac Martinez-Velis
3
Albert Wang
4
Jonathan Hopkins
2
Ya-Hong Xie
1
1
Department of Materials Science and Engineering, University of California Los Angeles
, 410 Westwood Plaza, 3111 Engineering V, Los Angeles, California 90095
2
Department of Mechanical and Aerospace Engineering, University of California Los Angeles
, 420 Westwood Plaza, 48-121 Engineering IV, Los Angeles, California 90095
3
Department of Electrical and Computer Engineering, University of California Los Angeles
, 420 Westwood Plaza, 56-125B Engineering IV, Los Angeles, California 90095
4
Department of Electrical and Computer Engineering, University of California Riverside
, 900 University Avenue, Suite 343 Winston Chung Hall, Riverside, California 92521a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 38, 023001 (2020)
Article history
Received:
September 24 2019
Accepted:
March 03 2020
Citation
Jimmy Ng, Talmage Jones, Isaac Martinez-Velis, Albert Wang, Jonathan Hopkins, Ya-Hong Xie; Effects of polymer residue on the pull-in of suspended graphene. J. Vac. Sci. Technol. B 1 March 2020; 38 (2): 023001. https://doi.org/10.1116/1.5126439
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