Transparent conducting Ga-doped ZnO films were grown by ultrasonic spray pyrolysis with the different Ga contents of 1.0–6.5 at. %. The Ga impact on the morphology, crystal structure, photoluminescence (PL), Ga cluster formation, and electrical resistivity of ZnO nanocrystal films has been investigated. ZnO-Ga films are characterized by the hexagonal wurtzite structure with the (002) preferential orientation. It was shown that the PL intensity of near band edge (NBE) emission band A (3.18 eV) enlarges at a Ga doping of 1.0–3.0 at. % together with the decrease in electrical resistivity. Simultaneously, the XRD peaks shift to high values due to the decrease in interplanar distances, and ZnO crystallinity improves. New NBE emission band B (3.08 eV) was detected in the PL spectra of films with the Ga content ≥3.0 at. %. The PL band B was assigned to the optical transitions via Ga-related clusters formed by Ga atoms at higher Ga concentrations. Simultaneously, the 2Θ positions of XRD peaks decrease, owing to the increase in the ZnO crystal lattice parameter, as well as the fall down in the NBE emission intensity and ZnO film crystallinity. To study the Ga ion charge states and Ga cluster formation in the ZnO:Ga films, x-ray photoelectron spectra have been investigated. The optimal Ga concentration in the ZnO films has been estimated.
Skip Nav Destination
Article navigation
January 2020
Research Article|
January 10 2020
Modification of near band edge emission and structure with Ga-related clusters in Ga-doped ZnO nanocrystal films
Tetyana V. Torchynska
;
Tetyana V. Torchynska
a)
1
Instituto Politécnico Nacional, ESFM
, Av. IPN, México City 07738, Mexico
Search for other works by this author on:
Brahim El Filali;
Brahim El Filali
2
Instituto Politécnico Nacional, UPIITA
, Av. IPN, México City 07320, Mexico
Search for other works by this author on:
Chetzyl I. Ballardo Rodriguez;
Chetzyl I. Ballardo Rodriguez
2
Instituto Politécnico Nacional, UPIITA
, Av. IPN, México City 07320, Mexico
Search for other works by this author on:
Georgiy Polupan
;
Georgiy Polupan
3
Instituto Politécnico Nacional, ESIME
, Av. IPN, México City 07738, Mexico
Search for other works by this author on:
Lyudmula Shcherbyna
Lyudmula Shcherbyna
4
V. Lashkaryov Institute of Semiconductor Physics at NASU
, Prospect Nauki 45, Kyiv 03028, Ukraine
Search for other works by this author on:
a)
Electronic mail: [email protected]
Note: This paper is part of the Special Collection of Papers from 10th International Symposium on Clusters and Nanomaterials (ISCAN - 2019).
J. Vac. Sci. Technol. B 38, 012210 (2020)
Article history
Received:
October 22 2019
Accepted:
December 09 2019
Citation
Tetyana V. Torchynska, Brahim El Filali, Chetzyl I. Ballardo Rodriguez, Georgiy Polupan, Lyudmula Shcherbyna; Modification of near band edge emission and structure with Ga-related clusters in Ga-doped ZnO nanocrystal films. J. Vac. Sci. Technol. B 1 January 2020; 38 (1): 012210. https://doi.org/10.1116/1.5133063
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
Future of plasma etching for microelectronics: Challenges and opportunities
Gottlieb S. Oehrlein, Stephan M. Brandstadter, et al.
Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
A. S. Stodolna, T. W. Mechielsen, et al.
Vertical silicon nanowedge formation by repetitive dry and wet anisotropic etching combined with 3D self-aligned sidewall nanopatterning
Yasser Pordeli, Céline Steenge, et al.