The authors report a novel approach to analyze the behavior of pulsed-laser-induced epitaxy on group-IV semiconductors by spectroscopic ellipsometry measurements and finite-element modeling of the thermo- and hydrodynamic behavior. Gradient-composition epitaxial crystals are obtained from previously atomically sharp heteroepitaxial samples through optically monitored processing with UV excimer laser pulses. Spectroscopic ellipsometry is employed to determine the composition gradient of the semiconductor alloy, and the results are correlated with energy-dispersive x-ray measurements. A finite-element modeling approach is developed based on the experimentally monitored melting dynamics and composition gradient results for understanding and prediction of the dynamics.

Topics
Energy dispersive X-ray spectroscopy, Epitaxy, Alloys, Atomic force microscopy, Semiconductor crystals, Depth profiling techniques, Finite-element analysis, Optical metrology, Lasers
1.
S.
 
Wirths
 et al.,
Nat. Photonics
 
9
,
88
(
2015
).
https://doi.org/10.1038/nphoton.2014.321
Google Scholar
Crossref
Search ADS
 
2.
X.
 
Gong
 et al.,
IEEE Electron Device Lett.
 
34
,
339
(
2013
).
https://doi.org/10.1109/LED.2012.2236880
Google Scholar
Crossref
Search ADS
 
3.
W.
 
Huang
,
B.
 
Cheng
,
C.
 
Xue
, and
C.
 
Li
,
Phys. B Condens. Matter
 
443
,
43
(
2014
).
https://doi.org/10.1016/j.physb.2014.03.008
Google Scholar
Crossref
Search ADS
 
4.
W.
 
Huang
,
B.
 
Cheng
,
C.
 
Xue
, and
H.
 
Yang
,
J. Alloys Compd.
 
701
,
816
(
2017
).
https://doi.org/10.1016/j.jallcom.2017.01.195
Google Scholar
Crossref
Search ADS
 
5.
J. R.
 
Abelson
,
T. W.
 
Sigmon
,
K. B.
 
Kim
, and
K. H.
 
Weiner
,
Appl. Phys. Lett.
 
52
,
230
(
1988
).
https://doi.org/10.1063/1.99528
Google Scholar
Crossref
Search ADS
 
6.
S.
 
Stefanov
 et al.,
Appl. Phys. Lett.
 
100
,
204102
(
2012
).
https://doi.org/10.1063/1.4714768
Google Scholar
Crossref
Search ADS
 
7.
J.
 
Schlipf
,
J. L.
 
Frieiro
,
I. A.
 
Fischer
,
C.
 
Serra
,
J.
 
Schulze
, and
S.
 
Chiussi
, “Growth of patterned GeSn and GePb alloys by pulsed laser induced epitaxy,” in 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO), Opatija, Croatia, 22–26 May 2017 (
IEEE
,
Piscataway, NJ
,
2017
), pp.
37
–
42
.
8.
J. C.
 
Conde
,
E.
 
Martín-Ortega
,
S.
 
Chiussi
,
F.
 
Gontad
,
C.
 
Serra-Rodríguez
, and
P.
 
González
,
Appl. Phys. Lett.
 
97
,
014102
(
2010
).
https://doi.org/10.1063/1.3452341
Google Scholar
Crossref
Search ADS
 
9.
G. E.
 
Jellison
,
D. H.
 
Lowndes
,
D. N.
 
Mashburn
, and
R. F.
 
Wood
,
MRS Proc.
 
51
,
143
(
1985
).
https://doi.org/10.1557/PROC-51-143
Google Scholar
Crossref
Search ADS
 
10.
P.
 
Bevington
 and
D.
 
Robinson
,
Data Reduction and Error Analysis for the Physical Sciences
(
McGraw-Hill Education
,
New York
,
2003
).
Google Scholar
 
11.
G.
 
Jellison
,
T.
 
Haynes
, and
H.
 
Burke
,
Opt. Mater.
 
2
,
105
(
1993
).
https://doi.org/10.1016/0925-3467(93)90035-Y
Google Scholar
Crossref
Search ADS
 
12.
P. G.
 
Snyder
,
J. A.
 
Woollam
,
S. A.
 
Alterovitz
, and
B.
 
Johs
,
J. Appl. Phys.
 
68
,
5925
(
1990
).
https://doi.org/10.1063/1.346921
Google Scholar
Crossref
Search ADS
 
13.
J. W.
 
Fleming
,
Appl. Opt.
 
23
,
4486
(
1984
).
https://doi.org/10.1364/AO.23.004486
Google Scholar
Crossref
Search ADS
PubMed
 
14.
D. A. G.
 
Bruggeman
,
Ann. Phys.
 
416
,
636
(
1935
).
https://doi.org/10.1002/andp.19354160705
Google Scholar
Crossref
Search ADS
 
15.
N.
 
Semmar
,
M.
 
Darif
,
E.
 
Millon
,
A.
 
Petit
,
H.
 
Etienne
, and
P.
 
Delaporte
,
AIP Conf. Proc.
 
1464
,
298
(
2012
).
https://doi.org/10.1063/1.4739883
Google Scholar
Crossref
Search ADS
 
16.
H.
 
Lu
,
T.
 
Wang
, and
Q.
 
Jiang
,
J. Cryst. Growth
 
293
,
294
(
2006
).
https://doi.org/10.1016/j.jcrysgro.2006.06.006
Google Scholar
Crossref
Search ADS
 
© 2019 Author(s).
2019
Author(s)
You do not currently have access to this content.