Temperature-dependent spectroscopic ellipsometry measurements, combined with AFM investigations, have been performed to reveal the interplay between the structural and electronic phase transitions during the insulator-to-metal transition in VO thin films with different thicknesses. A comprehensive analysis of the macroscopic optical response in the framework of an anisotropic Bruggeman effective medium approximation yields the hysteretic shape evolution of the metallic inclusions and the changes in film roughness due to the structural transitions during a temperature cycle. The authors show that the structural modifications in the material across the transition affect the metallic cluster shape in the vicinity of the percolation threshold, leading to an altered absorption by the localized plasmon resonances. The structural changes are supported by AFM measurements and can be explained by the particular strain present in different films.
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November 2019
Research Article|
October 08 2019
Interplay between electronic and structural transitions in VO2 revealed by ellipsometry
Ievgen Voloshenko;
Ievgen Voloshenko
1
1. Physikalisches Institut, Universität Stuttgart
, Pfaffenwaldring 57, 70550 Stuttgart, Germany
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Bruno Gompf;
Bruno Gompf
a)
1
1. Physikalisches Institut, Universität Stuttgart
, Pfaffenwaldring 57, 70550 Stuttgart, Germany
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Audrey Berrier
;
Audrey Berrier
1
1. Physikalisches Institut, Universität Stuttgart
, Pfaffenwaldring 57, 70550 Stuttgart, Germany
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Gabriel Schnoering
;
Gabriel Schnoering
1
1. Physikalisches Institut, Universität Stuttgart
, Pfaffenwaldring 57, 70550 Stuttgart, Germany
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Florian Kuhl;
Florian Kuhl
2
1. Physikalisches Institut und Zentrum für Materialforschung (LaMa), Justus Liebig Universität Giessen
, Heinrich-Buff-Ring 16, 35392 Giessen, Germany
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Angelika Polity
;
Angelika Polity
2
1. Physikalisches Institut und Zentrum für Materialforschung (LaMa), Justus Liebig Universität Giessen
, Heinrich-Buff-Ring 16, 35392 Giessen, Germany
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Martin Dressel
Martin Dressel
1
1. Physikalisches Institut, Universität Stuttgart
, Pfaffenwaldring 57, 70550 Stuttgart, Germany
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a)
Electronic mail: [email protected]
Note: This paper is part of the Conference Collection: 8th International Conference on Spectroscopic Ellipsometry 2019, ICSE.
J. Vac. Sci. Technol. B 37, 061202 (2019)
Article history
Received:
July 29 2019
Accepted:
September 24 2019
Citation
Ievgen Voloshenko, Bruno Gompf, Audrey Berrier, Gabriel Schnoering, Florian Kuhl, Angelika Polity, Martin Dressel; Interplay between electronic and structural transitions in VO2 revealed by ellipsometry. J. Vac. Sci. Technol. B 1 November 2019; 37 (6): 061202. https://doi.org/10.1116/1.5121903
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