Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This nTP technique is well suited for top-contacting sensitive thin films for electrical characterization; a typical electrode configuration is illustrated by transfer-printed 13 nm thin metal films that are separated by an electrically insulating gap of ca. 30 nm.
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July 2019
Letter|
June 25 2019
One-step transfer printing of patterned nanogap electrodes
Kai B. Saller;
Kai B. Saller
1
Molecular Electronics, Technische Universität München
, Theresienstr. 90, 80333 München, Germany
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Hubert Riedl;
Hubert Riedl
2
Physik Department, Walter Schottky Institut and Center for Nanotechnology and Nanomaterials, Technische Universität München
, Am Coulombwall 4, 85748 Garching, Germany
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Paolo Lugli;
Paolo Lugli
3
Faculty of Science and Technology, Free University of Bozen-Bolzano
, 39100 Bolzano, Italy
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Gregor Koblmüller;
Gregor Koblmüller
2
Physik Department, Walter Schottky Institut and Center for Nanotechnology and Nanomaterials, Technische Universität München
, Am Coulombwall 4, 85748 Garching, Germany
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Marc Tornow
Marc Tornow
a)
1
Molecular Electronics, Technische Universität München
, Theresienstr. 90, 80333 München, Germany
4
Fraunhofer Research Institution for Microsystems and Solid State Technologies (EMFT)
, Hansastrasse 27d, 80686 Munich, Germany
5
Center for NanoScience (CeNS), Ludwig-Maximilians-University, Geschwister-Scholl Platz 1, 80539 Munich
, Germany
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a)
Electronic mail: tornow@tum.de
J. Vac. Sci. Technol. B 37, 040602 (2019)
Article history
Received:
April 18 2019
Accepted:
May 28 2019
Connected Content
A companion article has been published:
Nanotransfer-printed stamps allow fabrication of top-contact nanogap electrodes
Citation
Kai B. Saller, Hubert Riedl, Paolo Lugli, Gregor Koblmüller, Marc Tornow; One-step transfer printing of patterned nanogap electrodes. J. Vac. Sci. Technol. B 1 July 2019; 37 (4): 040602. https://doi.org/10.1116/1.5100560
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