The relatively new electrospray droplet impact method is based on electrospray at atmospheric pressure and has been successful in achieving efficient desorption/ionization of biological molecules, soft etching of polymers, and nonselective etching of metal oxides. However, the beam current and brightness of this method are not practical for surface analyses. To improve the performance of this method, the authors have developed a new droplet ion beam gun using an electrospray of aqueous solutions in a vacuum. This technique could be expected to be a high-intensity massive cluster ion beam and they evaluate the performance of the vacuum-type electrospray droplet ion (V-EDI) gun. In this study, V-EDI and gas cluster ion beam guns were installed in a time-of-flight analyzer to directly compare the relative secondary ion yields of several biomolecules produced by several cluster ion beams.
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May 2018
Research Article|
May 11 2018
Relative secondary ion yields produced by vacuum-type electrospray droplet ion beams
Special Collection:
Special Issue on Secondary Ion Mass Spectrometry (SIMS)
Satoshi Ninomiya;
Satoshi Ninomiya
a)
Interdisciplinary Graduate School, University of Yamanashi
, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
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Lee Chuin Chen;
Lee Chuin Chen
Interdisciplinary Graduate School, University of Yamanashi
, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
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Kenzo Hiraoka
Kenzo Hiraoka
Clean Energy Research Center, University of Yamanashi
, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
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Satoshi Ninomiya
a)
Lee Chuin Chen
Kenzo Hiraoka
Interdisciplinary Graduate School, University of Yamanashi
, 4-3-11 Takeda, Kofu, Yamanashi 400-8511, Japan
a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 36, 03F134 (2018)
Article history
Received:
December 11 2017
Accepted:
April 23 2018
Citation
Satoshi Ninomiya, Lee Chuin Chen, Kenzo Hiraoka; Relative secondary ion yields produced by vacuum-type electrospray droplet ion beams. J. Vac. Sci. Technol. B 1 May 2018; 36 (3): 03F134. https://doi.org/10.1116/1.5019182
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