In order to overcome the limitations of sputter depth profiling, the authors have introduced focused ion beam-time-of-flight secondary ion mass spectrometry (FIB-TOF-SIMS). In this article, the authors summarize our investigation into the capability of Ar-gas cluster ion beam (GCIB) to remove FIB-induced molecular damage. The analysis of organic–inorganic hybrid mixture samples is applied and discussed. The authors demonstrate a method whereby the accurate and reproducible chemical depth distributions of atomic and molecular moieties in hybrid materials are successfully acquired. Our results reveal the approach of using Ar-GCIB for molecular recovery of FIB straggle to be highly reproducible and amenable to three-dimensional materials characterization.
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Research Article|
January 30 2018
Accurate and reproducible in-depth observation of organic–inorganic hybrid materials using FIB-TOF-SIMS
Special Collection:
Special Issue on Secondary Ion Mass Spectrometry (SIMS)
Shin-ichi Iida;
Shin-ichi Iida
a)
ULVAC-PHI, Inc.
, 370 Enzo, Chigasaki, Kanagawa 253-8522, Japan
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David M. Carr;
David M. Carr
Physical Electronics, Inc.
, 18725 Lake Drive East, Chanhassen, Minnesota 55317
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Gregory L. Fisher;
Gregory L. Fisher
Physical Electronics, Inc.
, 18725 Lake Drive East, Chanhassen, Minnesota 55317
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Takuya Miyayama
Takuya Miyayama
ULVAC-PHI, Inc.
, 370 Enzo, Chigasaki, Kanagawa 253-8522, Japan
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a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 36, 03F107 (2018)
Article history
Received:
November 14 2017
Accepted:
January 12 2018
Citation
Shin-ichi Iida, David M. Carr, Gregory L. Fisher, Takuya Miyayama; Accurate and reproducible in-depth observation of organic–inorganic hybrid materials using FIB-TOF-SIMS. J. Vac. Sci. Technol. B 1 May 2018; 36 (3): 03F107. https://doi.org/10.1116/1.5013670
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