Al1-xInxSb metamorphic step-graded buffers with Al0.6In0.4Sb terminal layers, designed to serve as a virtual substrate to support integrated InAs0.5Sb0.5 long-wave infrared absorber layers, were grown on GaSb wafers via molecular beam epitaxy. Two different structural profiles were used to define the effective composition of each buffer step: one based on digital alloys (1 nm period, ∼1.6 unit cells) and the other based on short period superlattices (10 nm period, ∼16 unit cells). Characterization via optical Nomarski microscopy, x-ray diffraction reciprocal space mapping, and transmission electron microscopy indicates that the digital alloy based structure behaves similar to that expected for a conventional bulk ternary alloy based structure, while the short period superlattice structure exhibits significantly hindered relaxation within the buffer layers.
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March 2018
Research Article|
March 19 2018
Investigation of digital alloyed AlInSb metamorphic buffers Available to Purchase
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Papers from the 33rd North American Conference on Molecular Beam Epitaxy
Vinita Dahiya;
Vinita Dahiya
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
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Julia I. Deitz;
Julia I. Deitz
Department of Material Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
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David A. Hollingshead;
David A. Hollingshead
Institute for Materials Research, The Ohio State University
, Columbus, Ohio 43210 and Nanotech West Laboratory, The Ohio State University
, Columbus, Ohio 43212
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John A. Carlin;
John A. Carlin
Institute for Materials Research, The Ohio State University
, Columbus, Ohio 43210 and Nanotech West Laboratory, The Ohio State University
, Columbus, Ohio 43212
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Tyler J. Grassman;
Tyler J. Grassman
Department of Material Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
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Sanjay Krishna
Sanjay Krishna
a)
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
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Vinita Dahiya
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210
Julia I. Deitz
Department of Material Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
David A. Hollingshead
Institute for Materials Research, The Ohio State University
, Columbus, Ohio 43210 and Nanotech West Laboratory, The Ohio State University
, Columbus, Ohio 43212
John A. Carlin
Institute for Materials Research, The Ohio State University
, Columbus, Ohio 43210 and Nanotech West Laboratory, The Ohio State University
, Columbus, Ohio 43212
Tyler J. Grassman
Department of Material Science and Engineering, The Ohio State University
, Columbus, Ohio 43210
Sanjay Krishna
a)
Department of Electrical and Computer Engineering, The Ohio State University
, Columbus, Ohio 43210a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 36, 02D111 (2018)
Article history
Received:
December 05 2017
Accepted:
February 23 2018
Citation
Vinita Dahiya, Julia I. Deitz, David A. Hollingshead, John A. Carlin, Tyler J. Grassman, Sanjay Krishna; Investigation of digital alloyed AlInSb metamorphic buffers. J. Vac. Sci. Technol. B 1 March 2018; 36 (2): 02D111. https://doi.org/10.1116/1.5018260
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