Focused soft X-ray beam induced deposition of metallic deposits from metal organic precursors is a promising novel technique for additive nanostructure fabrication. In the present work, the authors present a comparative study for deposition and in situ characterization of Co and Mn nanostructures in a scanning transmission x-ray microscope. The authors detect a significant selectivity of the deposition process with respect to the incident photon energy that arises from the enhanced x-ray absorption cross section of the precursor molecules for near-threshold excitation. This effect has been investigated for the L2,3-edges of the respective metal centers of two different precursor molecules as well as the N and O K-edges of the respective ligands. The authors find a photon-limited growth mode for deposition from cobalt tricarbonyl nitrosyl [Co(CO)3NO], while the process is precursor-limited for methylcyclopentadienyl manganese tricarbonyl [MeCpMn(CO)3] possibly due to a comparably low vapor pressure of the latter precursor.
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Research Article|
April 04 2017
Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition
Fan Tu;
Fan Tu
a)
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Andreas Späth;
Andreas Späth
a)
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Martin Drost;
Martin Drost
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Florian Vollnhals;
Florian Vollnhals
b)
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Sandra Krick Calderon;
Sandra Krick Calderon
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Rainer H. Fink;
Rainer H. Fink
c)
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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Hubertus Marbach
Hubertus Marbach
d)
Physikalische Chemie II and ICMM,
Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU)
, Egerlandstr.3, 91058 Erlangen, Germany
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a)
F. Tu and A. Späth contributed equally to this work.
b)
Present address: Materials Research and Technology, Luxembourg Institute of Science and Technology (LIST), 41 rue du Brill, 4422 Belvaux, Luxembourg.
c)
Also at: CENEM, Friedrich-Alexander-Universität Erlangen-Nürnberg (FAU), Egerlandstr.3, 91058 Erlangen, Germany.
d)
Electronic mail: hubertus.marbach@fau.de
J. Vac. Sci. Technol. B 35, 031601 (2017)
Article history
Received:
January 19 2017
Accepted:
March 07 2017
Citation
Fan Tu, Andreas Späth, Martin Drost, Florian Vollnhals, Sandra Krick Calderon, Rainer H. Fink, Hubertus Marbach; Exploring the fabrication of Co and Mn nanostructures with focused soft x-ray beam induced deposition. J. Vac. Sci. Technol. B 1 May 2017; 35 (3): 031601. https://doi.org/10.1116/1.4979274
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