Resonant cavity detectors based on III–V materials have been designed, grown entirely by molecular beam epitaxy, fabricated, and tested. They offer a low noise (dark current densities of 0.4 mA/cm2 were measured at 298 K, close to the predicted value of 0.31 mA/cm2), narrow response detector (full width at half maximum of 57 nm in GaSb and 45 nm in InAs) in the mid-infrared region, with future applications in spectroscopy, gas sensing, and optical communications.
References
1.
M. S.
Ünlü
and S.
Strite
, J. Appl. Phys.
78
, 607
(1995
).2.
L.
Cerutti
, A.
Ducanchez
, G.
Narcy
, P.
Grech
, G.
Boissier
, A.
Garnache
, E.
Tournié
, and F.
Genty
, J. Cryst. Growth
311
, 1912
(2009
).3.
J. G. A.
Wehner
, C. A.
Musca
, R. H.
Sewell
, J. M.
Dell
, and L.
Faraone
, Appl. Phys. Lett.
87
, 211104
(2005
).4.
M.
Arnold
, D.
Zimin
, and H.
Zogg
, Appl. Phys. Lett.
87
, 141103
(2005
).5.
J.
Wang
, J.
Hu
, P.
Becla
, A. M.
Agarwal
, and L. C.
Kimerling
, Opt. Express
18
, 12890
(2010
).6.
T.
Asano
, C.
Hu
, Y.
Zhang
, M.
Liu
, J. C.
Campbell
, and A.
Madhukar
, IEEE J. Quantum Electron.
46
, 1484
(2010
).7.
A.
Shen
, H. C.
Liu
, M.
Gao
, E.
Dupont
, M.
Buchanan
, J.
Ehret
, G. J.
Brown
, and F.
Szmulowicz
, Appl. Phys. Lett.
77
, 2400
(2000
).8.
A. M.
Green
, D. G.
Gevaux
, C.
Roberts
, P. N.
Stavrinou
, and C. C.
Phillips
, Semicond. Sci. Technol.
18
, 964
(2003
).9.
S.
Maimon
and G. W.
Wicks
, Appl. Phys. Lett.
89
, 151109
(2006
).10.
A.
Bracker
, M.
Yang
, B.
Bennett
, J.
Culbertson
, and W.
Moore
, J. Cryst. Growth
220
, 384
(2000
).11.
D. E.
Sidor
, B. T.
Marozas
, X.
Du
, W. D.
Hughes
, G. W.
Wicks
, and G. R.
Savich
, “MBE growth techniques for InAs-based nBn IR detectors
,” J. Vac. Sci. Technol. B
(to be published).12.
S.
Adachi
, J. Appl. Phys.
61
, 4869
(1987
).13.
H.
Angus Macleod
, Thin Film Optical Filters
, edited by W. T.
Welford
, 3rd ed. (Institute of Physics Publishing
, Bristol, UK
, 2001
), pp. 48
–50
.14.
G. R.
Savich
, D. E.
Sidor
, X.
Du
, C. P.
Morath
, V. M.
Cowan
, and G. W.
Wicks
, Appl. Phys. Lett.
106
, 173505
(2015
).© 2017 American Vacuum Society.
2017
American Vacuum Society
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