A physical simulation procedure was used to describe the processes behind the operation of devices based on TiN/Ti/HfO2/W structures. The equations describing the creation and destruction of conductive filaments formed by oxygen vacancies are solved in addition to the heat equation. The resistances connected with the metal electrodes were also considered. Resistive random access memories analyzed were fabricated, and many of the characteristics of the experimental data were reproduced with accuracy. Truncated-cone shaped filaments were employed in the model developed with metallic-like transport characteristics. A hopping current was also taken into account to describe the electron transport between the filament tip and the electrode. Hopping current is an essential component in the device high resistance state.
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January 2017
Research Article|
December 30 2016
In-depth study of the physics behind resistive switching in TiN/Ti/HfO2/W structures Available to Purchase
Gerardo González-Cordero;
Gerardo González-Cordero
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
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Francisco Jiménez-Molinos;
Francisco Jiménez-Molinos
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
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Juan Bautista Roldán;
Juan Bautista Roldán
a)
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
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Mireia Bargallo González;
Mireia Bargallo González
Institut de Microelectrònica de Barcelona
, IMB-CNM (CSIC), Campus UAB, 08193 Bellaterra, Spain
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Francesca Campabadal
Francesca Campabadal
Institut de Microelectrònica de Barcelona
, IMB-CNM (CSIC), Campus UAB, 08193 Bellaterra, Spain
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Gerardo González-Cordero
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
Francisco Jiménez-Molinos
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
Juan Bautista Roldán
a)
Departamento de Electrónica y Tecnología de Computadores,
Universidad de Granada
, 18071 Granada, Spain
Mireia Bargallo González
Institut de Microelectrònica de Barcelona
, IMB-CNM (CSIC), Campus UAB, 08193 Bellaterra, Spain
Francesca Campabadal
Institut de Microelectrònica de Barcelona
, IMB-CNM (CSIC), Campus UAB, 08193 Bellaterra, Spain
a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 35, 01A110 (2017)
Article history
Received:
August 27 2016
Accepted:
December 13 2016
Citation
Gerardo González-Cordero, Francisco Jiménez-Molinos, Juan Bautista Roldán, Mireia Bargallo González, Francesca Campabadal; In-depth study of the physics behind resistive switching in TiN/Ti/HfO2/W structures. J. Vac. Sci. Technol. B 1 January 2017; 35 (1): 01A110. https://doi.org/10.1116/1.4973372
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