Mapping and visualization of all degradation modes in both n- and p-channel field effect transistors, specifically devices for dynamic random access memory periphery, is performed in the (VG, VD) bias space applicable for complementary metal–oxide–semiconductor operation. This “all-in-one” approach allows for tracking and studying in parallel all degradation regimes, including bias temperature instability, hot carrier degradation, and off-state stress, as well as the transitions between them. It should prove beneficial when developing new very large-scale integrated technologies, since it allows for simultaneous comparison and checking of all degradation regimes and promptly identifying “weak spots” of each technology option. It also allows to choose the correct criteria (voltages or fields) at a later time and postprocessing the data as necessary.
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January 2017
Research Article|
December 30 2016
Mapping of CMOS FET degradation in bias space—Application to dram peripheral devices Available to Purchase
B. Kaczer;
J. Franco;
J. Franco
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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S. Tyaginov;
S. Tyaginov
TU Vienna
, Gusshausstrasse 27-29, Vienna A-1040, Austria
and Ioffe Institute
, Saint-Petersburg 194021, Russia
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M. Jech;
M. Jech
TU Vienna
, Gusshausstrasse 27-29, Vienna A-1040, Austria
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G. Rzepa;
G. Rzepa
TU Vienna
, Gusshausstrasse 27-29, Vienna A-1040, Austria
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T. Grasser;
T. Grasser
TU Vienna
, Gusshausstrasse 27-29, Vienna A-1040, Austria
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B. J. O'Sullivan;
B. J. O'Sullivan
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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R. Ritzenhaler;
R. Ritzenhaler
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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T. Schram;
T. Schram
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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A. Spessot;
A. Spessot
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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D. Linten;
D. Linten
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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N. Horiguchi
N. Horiguchi
imec
, Kapeldreef 75, Leuven B-3001, Belgium
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B. Kaczer
a)
J. Franco
S. Tyaginov
M. Jech
G. Rzepa
T. Grasser
B. J. O'Sullivan
R. Ritzenhaler
T. Schram
A. Spessot
D. Linten
N. Horiguchi
imec
, Kapeldreef 75, Leuven B-3001, Belgium
a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 35, 01A109 (2017)
Article history
Received:
September 01 2016
Accepted:
December 05 2016
Citation
B. Kaczer, J. Franco, S. Tyaginov, M. Jech, G. Rzepa, T. Grasser, B. J. O'Sullivan, R. Ritzenhaler, T. Schram, A. Spessot, D. Linten, N. Horiguchi; Mapping of CMOS FET degradation in bias space—Application to dram peripheral devices. J. Vac. Sci. Technol. B 1 January 2017; 35 (1): 01A109. https://doi.org/10.1116/1.4972872
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