Chemical depth profiling of III–V trenches containing InGaAs quantum wells with AlAs barriers selectively grown inside SiO2 cavities was studied using magnetic secondary ion mass spectrometry (SIMS). The authors show that the depth resolution of SIMS profiles of III-As layers degrades under extremely low energy oxygen beam sputtering (<500 eV) due to ripple formation and an increase in surface roughness. Improved SIMS depth resolution was observed by increasing the incident angle (∼50°–65°). Finally, the authors report the effect of sample rotation and orientation of the ion beam with respect to the trenches on depth profiling of III-As layers using time-of-flight SIMS.

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