An in situ synthesis process for nanowire arrays was used to fabricate a customized field emitter array for use as a nonthermal electron source in an ionization gauge. The wire arrays fabricated with this process had a density of 1.6 × 106 cm−2 using optimized deposition of the wires in template foils on predefined electrodes. The diameter of the wires varied from 100 to 400 nm and their length ranged from 8 to 100 μm. This method can enclose with nanowires a wide area of predefined electrodes, and is possible for areas larger than 3 cm2. Further, the cylindrical shape of the nanowires was modified into a conical geometry to achieve improved thermomechanical stability.
In situ synthesis of metallic nanowire arrays for ionization gauge electron sources
Farough Roustaie, Sebastian Quednau, Florian Dassinger, Helmut F. Schlaak, Marcel Lotz, Stefan Wilfert; In situ synthesis of metallic nanowire arrays for ionization gauge electron sources. J. Vac. Sci. Technol. B 1 March 2016; 34 (2): 02G103. https://doi.org/10.1116/1.4939756
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