In this work, the authors demonstrate the potential of epitaxially grown highly doped InSb as an engineered, wavelength-flexible mid-IR plasmonic material. The authors achieve doping concentrations over an order of magnitude larger than previously published results and show that such materials have plasma frequencies corresponding to energies larger than the material's band-gap. These semiconductor-based plasmonic metals open the door to homoepitaxial integration of plasmonic or epsilon-near-zero materials with optoelectronic devices at mid-infrared wavelengths. The materials are characterized by Hall measurements, mid-infrared transmission and reflection spectroscopy, and near-infrared transmission spectroscopy. The opportunities offered and the limitations presented by this material system are discussed and analyzed.
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September 2014
Research Article|
July 31 2014
Doped semiconductors with band-edge plasma frequencies
Stephanie Law;
Stephanie Law
Micro and Nano Technology Laboratory,
University of Illinois Urbana-Champaign
, 208 North Wright Street, Urbana, Illinois 61801
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Runyu Liu;
Runyu Liu
Micro and Nano Technology Laboratory,
University of Illinois Urbana-Champaign
, 208 North Wright Street, Urbana, Illinois 61801
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Daniel Wasserman
Daniel Wasserman
a)
Micro and Nano Technology Laboratory,
University of Illinois Urbana-Champaign
, 208 North Wright Street, Urbana, Illinois 61801
Search for other works by this author on:
a)
Electronic mail: dwass@illinois.edu
J. Vac. Sci. Technol. B 32, 052601 (2014)
Article history
Received:
April 25 2014
Accepted:
July 14 2014
Citation
Stephanie Law, Runyu Liu, Daniel Wasserman; Doped semiconductors with band-edge plasma frequencies. J. Vac. Sci. Technol. B 1 September 2014; 32 (5): 052601. https://doi.org/10.1116/1.4891170
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