The authors report on electron emission from HfC(310) operating in extended Schottky emission mode. Data are gathered from test stands as well as through operation in a commercial scanning electron microscope. Emitter end-form geometry consisted of rounded, via electrochemical etching, and truncated, via ion milling. The authors demonstrate high angular intensity operation of >60 mA/sr especially for the rounded end-form emitters. Advantages include robustness of the material, which is not reliant on material supply as is the case with standard ZrO/W(100) sources. Hence, operation is available over a much larger range of temperatures, fields, and potentially pressures. Operation in a commercial scanning electron microscope gave ten times higher beam currents for identical operational parameters over a standard Schottky source.

1.
W. A.
Mackie
,
R. L.
Hartman
, and
P. R.
Davis
,
Appl. Surf. Sci.
67,
29
(
1993
).
2.
W. A.
Mackie
,
J. L.
Morrissey
,
C. H.
Hinrichs
, and
P. R.
Davis
,
J. Vac. Sci. Technol. A
10,
2852
(
1992
).
3.
W. A.
Mackie
and
P. R.
Davis
,
IEEE Trans. Electron. Devices
36,
220
(
1989
).
4.
L. W.
Swanson
and
G. A.
Schwind
, in
Handbook of Charged Particle Optics
, 2nd ed., edited by
J.
Orloff
(
CRC
,
New York
,
2008
).
5.
R.
Gomer
,
Field Emission and Field Ionization
(
Harvard Univ. Press
,
Cambridge, MA,
1961)
.
6.
L. W.
Swanson
and
A. E.
Bell
,
Adv. Electron. Electron Phys.
32,
193
(
1973
).
7.
H.
Adachi
,
Y.
Shibuya
,
T.
Hariu
, and
Y.
Shibata
,
J. Phys. D: Appl. Phys
.
10
,
L113
(
1977
).
8.
J. A.
Simpson
,
Rev. Sci. Instrum.
32
,
1283
(
1961
).
9.
Michael R.
Scheinfein
, LLG Micromagnetics Simulator, Beaverton, OR 97005.
10.
W. A.
Mackie
and
G. G.
Magera
,
J. Vac. Sci. Technol. B
29
,
06F601
(
2011
).
11.
ASTM International, “Standard practice for scanning electron microscope beam size characterization,” Designation: E 986-04. See: www.astm.org,
2004
.
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