The authors present experimental results of electron beam driven structuring of GexSe1-x glass films with composition (x ∼ 0.2) that lies very close to the floppy to rigid stiffness transition for the purpose of achieving planar ridge optical waveguides. Chalcogenide thin films were deposited by pulsed laser deposition and spin-coating on thermally oxidized silicon substrates. The height and width of the induced deformations tend to increase with slower beam scan rates, greater number of exposures, larger beam currents, and thicker GexSe1-x films. Deformations greater than three times the original film thickness were obtained. Numerical analysis shows that guided wave optical modes are supported. Fabricated directional coupler, ring resonator, and grating structures are promising advances toward realizing planar lightwave devices by direct writing with an electron beam.
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November 2012
Research Article|
August 31 2012
Electron beam direct write of chalcogenide glass integrated optics
Galen B. Hoffman;
Galen B. Hoffman
Electroscience Laboratory, Department of Electrical and Computer Engineering, The Ohio State University
, Columbus
, Ohio 43210
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Ronald M. Reano
Ronald M. Reano
a)
Electroscience Laboratory, Department of Electrical and Computer Engineering, The Ohio State University
, Columbus
, Ohio 43210
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a)
Electronic mail: reano@ece.osu.edu
J. Vac. Sci. Technol. B 30, 06F301 (2012)
Article history
Received:
June 29 2012
Accepted:
August 13 2012
Citation
Galen B. Hoffman, Ronald M. Reano; Electron beam direct write of chalcogenide glass integrated optics. J. Vac. Sci. Technol. B 1 November 2012; 30 (6): 06F301. https://doi.org/10.1116/1.4748567
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