Strain-balanced InAs/InAs1−xSbx type-II superlattices (SLs) have been proposed for possible long-wavelength infrared applications. This paper reports a detailed structural characterization study of InAs/InAs1−xSbx SLs with varied Sb composition grown on GaSb (001) substrates by modulated and conventional molecular beam epitaxy (MBE). X-ray diffraction was used to determine the SL periods and the average composition of the InAs1−xSbx alloy layers. Cross-section transmission electron micrographs revealed the separate In(As)Sb/InAs(Sb) ordered-alloy layers within individual InAs1−xSbx layers for SLs grown by modulated MBE. For the SLs grown by conventional MBE, examination by high-resolution electron microscopy revealed that interfaces for InAs1−xSbx deposited on InAs were more abrupt, relative to InAs deposited on InAs1−xSbx: this feature was attributed to Sb surfactant segregation occurring during the SL growth. Overall, these results establish that strain-balanced SL structures with excellent crystallinity can be achieved with proper design (well thickness versus Sb composition) and suitably optimized growth conditions.
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March 2012
Research Article|
December 21 2011
Structural properties of InAs/InAs1–xSbx type-II superlattices grown by molecular beam epitaxy Available to Purchase
Lu Ouyang;
Lu Ouyang
a)
Department of Physics,
Arizona State University
, Tempe, Arizona
85287
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Elizabeth H. Steenbergen;
Elizabeth H. Steenbergen
School of Electrical, Computer and Energy Engineering and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287
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Yong-Hang Zhang;
Yong-Hang Zhang
School of Electrical, Computer and Energy Engineering and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287
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Kalyan Nunna;
Kalyan Nunna
California NanoSystems Institute,
University of California
, Los Angeles, California
90095
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Diana L. Huffaker;
Diana L. Huffaker
California NanoSystems Institute,
University of California
, Los Angeles, California
90095
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David J. Smith
David J. Smith
Department of Physics and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287
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Lu Ouyang
a)
Department of Physics,
Arizona State University
, Tempe, Arizona
85287
Elizabeth H. Steenbergen
School of Electrical, Computer and Energy Engineering and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287
Yong-Hang Zhang
School of Electrical, Computer and Energy Engineering and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287
Kalyan Nunna
California NanoSystems Institute,
University of California
, Los Angeles, California
90095
Diana L. Huffaker
California NanoSystems Institute,
University of California
, Los Angeles, California
90095
David J. Smith
Department of Physics and Center for Photonics Innovation,
Arizona State University
, Tempe, Arizona
85287a)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Vac. Sci. Technol. B 30, 02B106 (2012)
Article history
Received:
September 20 2011
Accepted:
December 03 2011
Citation
Lu Ouyang, Elizabeth H. Steenbergen, Yong-Hang Zhang, Kalyan Nunna, Diana L. Huffaker, David J. Smith; Structural properties of InAs/InAs1–xSbx type-II superlattices grown by molecular beam epitaxy. J. Vac. Sci. Technol. B 1 March 2012; 30 (2): 02B106. https://doi.org/10.1116/1.3672026
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