In this paper, we report an innovative nanodiamond field emitter structure consisting of an individual pyramidal tip sitting on top of a ballast resistor “pole.” The tip-on-pole nanodiamond structures are fabricated by a new mold transfer process that is comprised of reactive-ion-etching of 3.5 μm-thick thermal oxide on Si substrate, anisotropic etching of Si, tip sharpening by thermal oxidation and chemical vapor deposition of nanodiamond. The fabricated tip-on-pole nitrogen-incorporated nanodiamond emitter exhibits a low turn-on electric field of 3.5 V/um and a very high emission current density of ∼1.7 A/cm2 at an electric field of ∼7.5 V/um. Analysis of the emission current based on Fowler–Nordheim theory indicates a current regulated regime due to the pole-structured ballast resistor with the resistance value of ∼140 kΩ. Thus, the diamond pole ballast resistor has proven to provide self-limiting of emission current that improves the total current density as well as the emission current stability of the pyramidal nanodiamond emitters. Therefore, the proposed tip-on-pole nanodiamond emitters show great promise for high current and power applications.
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March 2012
Research Article|
February 13 2012
Advanced nanodiamond emitter with pyramidal tip-on-pole structure for emission self-regulation Available to Purchase
Anurat Wisitsora-at;
Anurat Wisitsora-at
Department of Electrical Engineering and Computer Science,
Vanderbilt University
, Nashville, Tennessee 37235 and National Electronics and Computer Technology Center, 112 Pahol Yothin Road, Pathumthani 12120, Thailand
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Shao-Hua Hsu;
Shao-Hua Hsu
Department of Electrical Engineering and Computer Science,
Vanderbilt University
, Nashville, Tennessee 37235
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Weng P. Kang;
Weng P. Kang
a)
Department of Electrical Engineering and Computer Science,
Vanderbilt University
, Nashville, Tennessee 37235
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Jimmy L. Davidson;
Jimmy L. Davidson
Department of Electrical Engineering and Computer Science,
Vanderbilt University
, Nashville, Tennessee 37235
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Adisorn Tuantranont
Adisorn Tuantranont
National Electronics and Computer Technology Center
, 112 Pahol Yothin Road, Pathumthani 12120, Thailand
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Anurat Wisitsora-at
Shao-Hua Hsu
Weng P. Kang
a)
Jimmy L. Davidson
Adisorn Tuantranont
Department of Electrical Engineering and Computer Science,
Vanderbilt University
, Nashville, Tennessee 37235 and National Electronics and Computer Technology Center, 112 Pahol Yothin Road, Pathumthani 12120, Thailand
a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 30, 022204 (2012)
Article history
Received:
August 26 2011
Accepted:
January 21 2012
Citation
Anurat Wisitsora-at, Shao-Hua Hsu, Weng P. Kang, Jimmy L. Davidson, Adisorn Tuantranont; Advanced nanodiamond emitter with pyramidal tip-on-pole structure for emission self-regulation. J. Vac. Sci. Technol. B 1 March 2012; 30 (2): 022204. https://doi.org/10.1116/1.3684425
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