Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO2 by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate
REFERENCES
1.
C. C.
Yang
and W. C.
Chen
, J. Mater. Chem.
12
, 1138
(2002
).2.
H.
Namatsu
, T.
Yamajuchi
, M.
Nagase
, and K.
Kurihara
, Microelectron. Eng.
41–42
, 331
(1998
).3.
D.
Gil
, R.
Menon
, and H. I.
Smith
, J. Vac. Sci. Technol. B
21
, 2956
(2003
).4.
S.
Matsui
, Y.
Igaku
, H.
Isjigaki
, J.
Fujita
, Y.
Ochiai
, H.
Namatsu
, and M.
Momuro
, J. Vac. Sci. Technol. B
21
, 688
(2003
).5.
Y.
Kang
, M.
Okada
, C.
Minari
, K.
Kanda
, Y.
Haruyama
, and S.
Matsui
, Jpn. J. Appl. Phys.
49
, 06GL13
(2010
).6.
C.
Peroz
, V.
Chauveau
, E.
Barthel
, and E.
Søndergard
, Adv. Mater.
21
, 555
(2009
).7.
S. H.
Ko
, I. K.
Park
, H.
Pan
, C. P.
Grigoropoulos
, A. P.
Pisano
, C. K.
Luscombe
, and J. M. J.
Frchet
, Nano Lett.
7
, 1869
(2007
).8.
K. Y.
Yang
, K. M.
Yoon
, S.
Lim
, and H.
Lee
, J. Vac. Sci. Technol. B
27
, 2786
(2009
).9.
K. Y.
Yang
, K. M.
Yoon
, K. W.
Choi
, and H.
Lee
, Microelectron. Eng.
86
, 2228
(2009
).10.
X. M.
Zhao
, Y.
Xia
, and G. M.
Whitesides
, J. Mater. Chem.
7
, 1069
(1997
).11.
N.
Koo
, M.
Bender
, U.
Plachetka
, A.
Fuchs
, T.
Wahlbrink
, J.
Bolten
, and H.
Kurz
, Microelectron. Eng.
84
, 904
(2007
).12.
H.
Lee
and G. Y.
Jung
, Microelectron. Eng.
77
, 168
(2005
).13.
S.A.
Stern
, V.M.
Shah
, and B.J.
Hardy
, J. Polym. Sci. B Polym. Phys.
25
, 1263
(1987
).14.
B.
Bika
, G. I.
Tardos
, S.
Panmai
, L.
Farber
, and J.
Michaels
, Powder Technol.
150
, 104
(2005
).15.
G. I.
Tardos
and R.
Gupta
, Powder Technol.
87
, 175
(1996
).16.
A.
Maskara
and D. M.
Smith
, J. Am. Ceram. Soc.
80
, 1715
(1997
).17.
Y.
Xie
, Z.
Lu
, and F.
Li
, Opt. Express
11
, 992
(2003
).18.
J. A.
Rogers
, R. J.
Jackman
, and G. M.
Whitesides
, Adv. Mater.
9
, 475
(1997
).19.
C. M.
Ho
, Annu. Rev. Fluid Mech.
30
, 579
(1998
).© 2011 American Vacuum Society.
2011
American Vacuum Society
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