In this article, a novel microfabricated thermoresistive scanning thermal microscopy probe is presented. It is a V-shaped silicon nitride cantilever with platinum lines and a sharp off-plane nanotip. The cantilever fabrication sequence incorporates standard complementary metal oxide semiconductor technology processes and therefore provides high reproducibility, while the tip is additionally processed by focused ion beam, enabling high-sensitivity and high-resolution thermal sensing. The nanoprobe is designed for scanning thermal microscopes, operating in standard atomic force microscope setup with an optical detection system. The measurement setup, which is also presented, takes advantage of the four-point design of the probe by inclusion of a Thomson bridge and a modified Wheatstone bridge measurement electronics.
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November 2010
Research Article|
November 10 2010
Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy
G. Wielgoszewski;
Faculty of Microsystem Electronics and Photonics,
Wrocław University of Technology
, 50-372 Wrocław, Poland
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P. Sulecki;
P. Sulecki
Faculty of Microsystem Electronics and Photonics,
Wrocław University of Technology
, 50-372 Wrocław, Poland
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T. Gotszalk;
T. Gotszalk
Faculty of Microsystem Electronics and Photonics,
Wrocław University of Technology
, 50-372 Wrocław, Poland
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P. Janus;
P. Janus
Institute of Electron Technology
, 02-668 Warszawa, Poland
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D. Szmigiel;
D. Szmigiel
Institute of Electron Technology
, 02-668 Warszawa, Poland
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P. Grabiec;
P. Grabiec
Institute of Electron Technology
, 02-668 Warszawa, Poland
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E. Zschech
E. Zschech
Fraunhofer Institute for Non-Destructive Testing
, Dresden Branch, 01109 Dresden, Germany
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a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 28, C6N7–C6N11 (2010)
Article history
Received:
July 13 2010
Accepted:
September 20 2010
Citation
G. Wielgoszewski, P. Sulecki, T. Gotszalk, P. Janus, D. Szmigiel, P. Grabiec, E. Zschech; Microfabricated resistive high-sensitivity nanoprobe for scanning thermal microscopy. J. Vac. Sci. Technol. B 1 November 2010; 28 (6): C6N7–C6N11. https://doi.org/10.1116/1.3502614
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