The effect of the chemical pattern spot size, the spacing on the size, and the shape of the cylindrical domains in thin films of a ternary block copolymer/homopolymer/homopolymer blend was investigated over a range of homopolymer volume fractions. Cylinder-forming ternary blends were composed of polystyrene-block-poly(methyl methacrylate) , and the corresponding PS and PMMA homopolymers were directed to assemble on chemical patterns that had density multiplication ratios ranging from 1:1 to 4:1. By increasing the homopolymer fraction in the blends, the dimensions of the domains were expanded. When the size of the spots on the chemical pattern was not matched with the size of the domain of the blend in the bulk, the dimensions of the domains at the free surface of the assembled films differed from those at the interface with the chemical pattern.
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November 2010
Research Article|
November 30 2010
Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns
Huiman Kang;
Huiman Kang
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Francois Detcheverry;
Francois Detcheverry
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Karl O. Stuen;
Karl O. Stuen
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Gordon S. W. Craig;
Gordon S. W. Craig
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Juan J. de Pablo;
Juan J. de Pablo
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Padma Gopalan;
Padma Gopalan
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Paul F. Nealey
Paul F. Nealey
a)
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706
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Huiman Kang
Francois Detcheverry
Karl O. Stuen
Gordon S. W. Craig
Juan J. de Pablo
Padma Gopalan
Paul F. Nealey
a)
Department of Chemical and Biological Engineering,
University of Wisconsin
, Madison, WI 53706a)
Author to whom correspondence should be addressed; electronic mail; [email protected]
J. Vac. Sci. Technol. B 28, C6B24–C6B29 (2010)
Article history
Received:
July 13 2010
Accepted:
October 27 2010
Citation
Huiman Kang, Francois Detcheverry, Karl O. Stuen, Gordon S. W. Craig, Juan J. de Pablo, Padma Gopalan, Paul F. Nealey; Shape control and density multiplication of cylinder-forming ternary block copolymer-homopolymer blend thin films on chemical patterns. J. Vac. Sci. Technol. B 1 November 2010; 28 (6): C6B24–C6B29. https://doi.org/10.1116/1.3518910
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