In this work, we used scanning electron microscopy (SEM), in situ coherent small angle x-ray scattering (SAXS), and Monte Carlo molecular simulation to gain insights into the dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces. During directed assembly, it was observed with SEM that poly(styrene-block-methyl methacrylate) initially formed discrete polystyrene domains that lacked long-range order at the free surface. After further annealing, the polystyrene domains gradually coalesced into linear domains that were not registered fully with the underlying chemical pattern. The linear domains could be trapped in metastable morphologies. Finally, the linear polystyrene domains formed perpendicular lamellae in full registration with the underlying chemical pattern. It was revealed with SAXS that scattering peaks characteristic of the period of the chemical pattern appeared and disappeared at the early stages of assembly. Finally, the morphological evolution of directed assembly of block copolymer on chemically patterned surfaces was modeled by molecular simulations.
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November 2010
Research Article|
November 29 2010
Mechanism and dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces Available to Purchase
Guoliang Liu;
Guoliang Liu
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Sean P. Delcambre;
Sean P. Delcambre
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Karl O. Stuen;
Karl O. Stuen
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Gordon S. W. Craig;
Gordon S. W. Craig
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Juan J. de Pablo;
Juan J. de Pablo
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Paul F. Nealey;
Paul F. Nealey
a)
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706
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Kim Nygård;
Kim Nygård
Department of Synchrotron Radiation and Nanotechnology,
Paul Scherrer Institut
, CH-5232 Villigen, Switzerland
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Dillip K. Satapathy;
Dillip K. Satapathy
Department of Synchrotron Radiation and Nanotechnology,
Paul Scherrer Institut
, CH-5232 Villigen, Switzerland
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Oliver Bunk;
Oliver Bunk
Department of Synchrotron Radiation and Nanotechnology,
Paul Scherrer Institut
, CH-5232 Villigen, Switzerland
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Harun H. Solak
Harun H. Solak
Department of Synchrotron Radiation and Nanotechnology,
Paul Scherrer Institut
, CH-5232 Villigen, Switzerland
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Guoliang Liu
Sean P. Delcambre
Karl O. Stuen
Gordon S. W. Craig
Juan J. de Pablo
Paul F. Nealey
a)
Kim Nygård
Dillip K. Satapathy
Oliver Bunk
Harun H. Solak
Department of Chemical and Biological Engineering,
University of Wisconsin–Madison
, Madison, Wisconsin 53706a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 28, C6B13–C6B19 (2010)
Article history
Received:
July 13 2010
Accepted:
October 27 2010
Citation
Guoliang Liu, Sean P. Delcambre, Karl O. Stuen, Gordon S. W. Craig, Juan J. de Pablo, Paul F. Nealey, Kim Nygård, Dillip K. Satapathy, Oliver Bunk, Harun H. Solak; Mechanism and dynamics of block copolymer directed assembly with density multiplication on chemically patterned surfaces. J. Vac. Sci. Technol. B 1 November 2010; 28 (6): C6B13–C6B19. https://doi.org/10.1116/1.3518918
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