Using electron and synchrotron x-ray diffraction, the authors investigate the reconstructions induced on the Si (001) surface by the presence of a submonolayer of Sr atoms. These Sr surface phases on Si (001) are the first steps in the synthesis of crystalline oxide on silicon heterostructures. Through the use of in situ reflection high energy electron diffraction, the authors observe transitions in the surface symmetry as monolayer Sr is deposited at . Anomalous synchrotron x-ray diffraction studies of the structure are consistent with a model where each Sr atom replaces two silicon dimers, resulting in a change in the surface Si stoichiometry. X-ray diffraction from the surface formed when the Sr deposition occurs at room temperature shows a different dependence on x-ray energy and is consistent with a surface phase consisting of Sr adsorbed onto a stoichiometric Si surface.
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July 2009
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
July 30 2009
Diffraction studies of submonolayer Sr structures on the Si (001) surface
J. W. Reiner;
J. W. Reiner
a)
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284
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Y. Segal;
Y. Segal
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284
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K. F. Garrity;
K. F. Garrity
Department of Physics,
Yale University
, New Haven, Connecticut 06520-8120
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H. Hong;
H. Hong
Advanced Photon Source,
Argonne National Laboratory
, 9700 South Cass Avenue, Argonne, Illinois 60439
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S. Ismail-Beigi;
S. Ismail-Beigi
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284 and Department of Physics, Yale University
, New Haven, Connecticut 06520-8120
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C. H. Ahn;
C. H. Ahn
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284 and Department of Physics, Yale University
, New Haven, Connecticut 06520-8120
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F. J. Walker
F. J. Walker
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284
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J. W. Reiner
a)
Y. Segal
K. F. Garrity
H. Hong
S. Ismail-Beigi
C. H. Ahn
F. J. Walker
Department of Applied Physics,
Yale University
, New Haven, Connecticut 06520-8284a)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 27, 2015–2019 (2009)
Article history
Received:
February 25 2009
Accepted:
April 27 2009
Citation
J. W. Reiner, Y. Segal, K. F. Garrity, H. Hong, S. Ismail-Beigi, C. H. Ahn, F. J. Walker; Diffraction studies of submonolayer Sr structures on the Si (001) surface. J. Vac. Sci. Technol. B 1 July 2009; 27 (4): 2015–2019. https://doi.org/10.1116/1.3139866
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