The authors report the results of a detailed study of the effect of growth conditions, for molecular beam epitaxy, on the structural and optical properties of self-assembled InAs quantum dots (QDs) on . InAs QDs both buried in, and on top of, were analyzed using photoluminescence (PL) and atomic force microscopy. InAs QD morphology and peak PL emission wavelength both scale linearly with deposition thickness in monolayers (MLs). InAs deposition thickness can be used to tune QD PL wavelength by /ML, over a range of almost . Increasing growth temperature from results in a linear decrease in QD size and a blueshift in peak emission wavelength of . This is a direct result of the temperature dependence of the In-sticking coefficient. InAs deposited on InP-lattice-matched forms larger, lower-density features with longer PL wavelength, as expected from a consideration of the effects of In segregation and intermixing on strain and surface roughness. Choice of buffer material is shown to be critical to QD characteristics.
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May 2007
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
May 31 2007
Growth by molecular beam epitaxy of self-assembled InAs quantum dots on InAlAs and InGaAs lattice-matched to InP Available to Purchase
P. J. Simmonds;
Cavendish Laboratory,
University of Cambridge
, JJ Thomson Avenue, Cambridge CB3 0HE, United Kingdom
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H. E. Beere;
H. E. Beere
Cavendish Laboratory,
University of Cambridge
, JJ Thomson Avenue, Cambridge CB3 0HE, United Kingdom
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H. W. Li;
H. W. Li
Toshiba Research Europe Limited,
Cambridge Research Laboratory
, 260 Cambridge Science Park, Milton Road, Cambridge CB4 0WE, United Kingdom
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P. See;
P. See
Toshiba Research Europe Limited,
Cambridge Research Laboratory
, 260 Cambridge Science Park, Milton Road, Cambridge CB4 0WE, United Kingdom
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A. J. Shields;
A. J. Shields
Toshiba Research Europe Limited,
Cambridge Research Laboratory
, 260 Cambridge Science Park, Milton Road, Cambridge CB4 0WE, United Kingdom
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D. A. Ritchie
D. A. Ritchie
Cavendish Laboratory,
University of Cambridge
, JJ Thomson Avenue, Cambridge CB3 0HE, United Kingdom
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P. J. Simmonds
H. E. Beere
H. W. Li
P. See
A. J. Shields
D. A. Ritchie
Cavendish Laboratory,
University of Cambridge
, JJ Thomson Avenue, Cambridge CB3 0HE, United Kingdoma)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Vac. Sci. Technol. B 25, 1044–1048 (2007)
Article history
Received:
December 07 2006
Accepted:
March 19 2007
Citation
P. J. Simmonds, H. E. Beere, H. W. Li, P. See, A. J. Shields, D. A. Ritchie; Growth by molecular beam epitaxy of self-assembled InAs quantum dots on InAlAs and InGaAs lattice-matched to InP. J. Vac. Sci. Technol. B 1 May 2007; 25 (3): 1044–1048. https://doi.org/10.1116/1.2731334
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