Indium-zinc oxide (IZO) films were grown on glass substrates by rf magnetron sputtering using targets of 50mol%In2O350mol%In2O3(ZnO)3 and In2ZnkOk+3 (k=3, 4, 5, and 7) at room temperature and 300°C. The difference in Zn content between the films and the sputter targets varied with the growth temperature. The structural, electrical, and optical properties of the IZO films were investigated as a function of Zn content. The crystal structure of IZO films grown at room temperature changed from amorphous to crystalline at a Zn content (Zn(Zn+In)) of 68at.%. IZO films grown at 300°C using a target of 50% In2O350%In2O3(ZnO)3 had a Zn content of 40at.% and its x-ray diffraction peaks were matched with those of ITO. As the Zn content in IZO thin films grown at 300°C increased from 40to74at.%, the conductivity and optical band gap energy decreased.

1.
A.
Shah
,
P.
Torres
,
R.
Tscharner
,
N.
Wyrsch
, and
H.
Keppner
,
Science
285
,
692
(
1999
).
2.
Han-Ki
Kim
,
Kyu-Sung
Lee
, and
J. H.
Kwon
,
Appl. Phys. Lett.
88
,
012103
(
2006
).
3.
K.
Ramamoorthy
,
K.
Kumar
,
R.
Chandramohan
, and
K.
Sankaranarayanan
,
Mater. Sci. Eng., B
126
,
1
(
2006
).
4.
D. S.
Gilnley
and
C.
Bright
,
MRS Bull.
25
,
15
(
2000
).
5.
R. H.
Franken
,
C. H. M.
van der Werf
,
J.
Löffler
,
J. K.
Rath
, and
R. E. I.
Schropp
,
Thin Solid Films
501
,
47
(
2006
).
6.
Yoon-Heung
Tak
,
Ki-Beom
Kim
,
Hyoung-Guen
Park
,
Kwang-Ho
Lee
, and
Jong-Ram
Lee
,
Thin Solid Films
411
,
12
(
2002
).
7.
I.
Hamberg
and
C. G.
Granqvist
,
J. Appl. Phys.
60
,
R123
(
1986
).
8.
Y. W.
Heo
,
S. J.
Park
,
K.
Ip
,
S. J.
Pearton
, and
D. P.
Norton
,
Appl. Phys. Lett.
83
,
1128
(
2003
).
9.
T.
Minami
,
MRS Bull.
25
,
38
(
2000
).
10.
D. D.
Edwards
,
T. O.
Mason
,
F.
Goutenoire
, and
K. R.
Poeppelmeier
,
Appl. Phys. Lett.
70
,
1706
(
1997
).
11.
J. D.
Perkins
 et al,
Thin Solid Films
411
,
152
(
2002
).
12.
G. B.
Palmer
and
K. R.
Poeppelmeier
,
Solid State Sci.
4
,
317
(
2002
).
13.
Tadatsugu
Minami
,
Toshihiro
Miyata
, and
Takashi
Yamamoto
,
Surf. Coat. Technol.
108–109
,
583
(
1998
).
14.
K.
Nomura
 et al,
J. Appl. Phys.
95
,
5532
(
2004
).
15.
Burag
Yaglioglu
,
Hyo-Young
Yeom
, and
David C.
Paine
,
Appl. Phys. Lett.
86
,
261908
(
2005
).
16.
N.
Ito
,
Y.
Sato
,
P. K.
Song
,
A.
Kaijio
,
K.
Inoue
, and
Y.
Shigesato
,
Thin Solid Films
496
,
99
(
2006
).
17.
Yeon Sik
Jung
,
Ji Yoon
Seo
,
Dong Wook
Lee
, and
Duk Young
Jeon
,
Thin Solid Films
445
,
63
(
2003
).
18.
N.
Naghavi
,
A.
Rougier
,
C.
Marcel
,
C.
Guery
,
J. B.
Leriche
, and
J. M.
Tarascon
,
Thin Solid Films
360
,
233
(
2000
).
19.
W. J.
Lee
 et al,
Solid-State Electron.
46
,
477
(
2002
).
20.
N.
Kimizuka
,
M.
Isobe
, and
M.
Nakamura
,
J. Solid State Chem.
116
,
170
(
1995
).
21.
Horlin,
G.
Svensson
, and
E.
Olsson
,
J. Mater. Chem.
8
,
2465
(
1998
).
22.
A.
Wang
,
J.
Dai
,
J.
Cheng
,
M. P.
Chudzik
,
T. J.
Marks
,
R. P. H.
Chang
, and
C. R.
Kannewurf
,
Appl. Phys. Lett.
73
,
327
(
1998
).
23.
K.
Tominaga
,
T.
Takao
,
A.
Fukushima
,
T.
Moriga
, and
I.
Nakabayashi
,
Vacuum
66
,
505
(
2002
).
24.
T.
Minami
,
T.
Kakumu
,
Y.
Takeda
, and
S.
Takata
,
Thin Solid Films
290–291
,
1
(
1996
).
25.
T.
Minami
,
T.
Kakumu
,
Y.
Takeda
, and
S.
Takata
,
Thin Solid Films
317
,
326
(
1998
).
26.
N.
Naghavi
,
C.
Marcel
,
L.
Dupont
,
A.
Rougier
,
J. B.
Leriche
, and
C.
Guery
,
J. Mater. Chem.
10
,
2315
(
2000
).
27.
S. Y.
Lee
and
B. O.
Park
,
Thin Solid Films
484
,
184
(
2005
).
28.
Keun-Young
Son
,
Dong-Hyuk
Park
,
Joon-Hyung
Lee
,
Jeong-Joo
Kim
, and
Jai-Sung
Lee
,
Solid State Ionics
172
,
425
(
2004
).
29.
Tadatsugu
Minami
,
Takashi
Yamamoto
,
Yukinobu
Toda
, and
Toshihiro
Miyata
,
Thin Solid Films
373
,
189
(
2000
).
30.
L.
Dupont
,
C.
Maugy
,
N.
Naghavi
,
C.
Guery
, and
J.-M.
Tarascon
,
J. Solid State Chem.
158
,
119
(
2001
).
31.
K. L.
Chopra
and
S. R.
Das
,
Thin Film Solar Cells
(
Plenum
,
New York
,
1983
) pp.
52
and
.
32.
E.
Burstain
,
Phys. Rev.
93
,
632
(
1954
);
T. S.
Moss
,
Proc. Phys. Soc. London, Sect. B
76
,
775
(
1954
).
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