Even now there are no device simulators that can model hole carrier transport in -channel Si or SiGe metal-oxide-semiconductor field-effect transistors (MOSFETs), by properly addressing the issues of hole band-structure and quantum confinement effects. The purpose of this work is to remedy this situation by presenting an approach to modeling -channel devices using a two-dimensional (2D) Monte Carlo transport kernel that is coupled self-consistently to a 2D Poisson equation solver and to a six band band-structure module. The need for full band solver for hole transport is especially true in the case of surface channel strained Si and buried channel strained SiGe -MOSFETs investigated here. We have paid special attention on properly implementing and investigating the role of interface roughness on the operation of these device structures. We find that SiGe -channel MOSFETs show performance improvement only for low gate and drain biases; i.e., when the device is operated in subthreshold and weak inversion regime and carrier spillover into the surface channel and surface roughness do not play significant role on the device operation.
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July 2006
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
July 25 2006
Self-consistent full band two-dimensional Monte Carlo two-dimensional Poisson device solver for modeling SiGe -channel devices
S. Krishnan;
S. Krishnan
a)
Arizona State University
, Tempe, Arizona 875706
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M. Fischetti;
M. Fischetti
b)
University of Massachusetts Amherst
, Amherst, Massachusetts 01003
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D. Vasileska
D. Vasileska
c)
Arizona State University
, Tempe, Arizona 875706
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J. Vac. Sci. Technol. B 24, 1997–2003 (2006)
Article history
Received:
January 15 2006
Accepted:
February 27 2006
Citation
S. Krishnan, M. Fischetti, D. Vasileska; Self-consistent full band two-dimensional Monte Carlo two-dimensional Poisson device solver for modeling SiGe -channel devices. J. Vac. Sci. Technol. B 1 July 2006; 24 (4): 1997–2003. https://doi.org/10.1116/1.2216718
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