Three primary color luminescence from nanocrystalline silicon (nc-Si) prepared by hydrofluoric (HF) acid solution and subsequent oxidation treatments were studied using photoluminescence and Fourier transform infrared spectroscopy measurements. HF-treated nc-Si exhibited stable and strong red luminescence in the air. When the HF-treated nc-Si surface was oxidized by native and/or thermal treatment, the luminescence color varied continuously from red to blue. The reason is the enlargement of the effective band gap energy because of a reduced particle size caused by surface oxidation. The blue and green luminescence of thermally oxidized nc-Si could be distinctly seen in the air with the naked eye. These results suggest that the HF and post-thermal oxidation treatments can realize good stability and higher brightness in the air for three primary color luminescence from nc-Si.
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March 2006
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
February 17 2006
Three primary color luminescence from natively and thermally oxidized nanocrystalline silicon
Keisuke Sato;
Keisuke Sato
a)
Department of Electronic and Computer Engineering,
Tokyo Denki University
, Ishizaka, Hatoyama, Hikigun, Saitama 350-0394, Japan
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Kenji Hirakuri
Kenji Hirakuri
Department of Electronic and Computer Engineering,
Tokyo Denki University
, Ishizaka, Hatoyama, Hikigun, Saitama 350-0394, Japan
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a)
Author to whom correspondence should be addressed; also with: Department of Applied Science, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-1292, Japan; electronic mail: sato@f.dendai.ac.jp
J. Vac. Sci. Technol. B 24, 604–607 (2006)
Article history
Received:
May 26 2005
Accepted:
January 09 2006
Citation
Keisuke Sato, Kenji Hirakuri; Three primary color luminescence from natively and thermally oxidized nanocrystalline silicon. J. Vac. Sci. Technol. B 1 March 2006; 24 (2): 604–607. https://doi.org/10.1116/1.2172253
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