Calibration of lateral force microscopy cantilevers is essential for the measurement of nanonewton and piconewton frictional forces, which are critical to analytical applications of polymer surfaces, biological structures, and organic molecules at nanoscale lateral resolution. We have developed a compact and easy-to-use reference artifact for this calibration, the lateral electrical nanobalance (LEN), which can be made traceable to the Système International d'Unités. A noncontact method has been developed for measuring the lateral spring constant of these artefacts, by a combination of electrical measurements and Doppler velocimetry. Traceability is crucial to ensure that force measurements by an atomic force microscope are comparable to those made by optical tweezers and other methods. The LEN is a microelectromechanical system device fabricated by silicon-on-insulator micromachining, and therefore has extremely low mass and good immunity to vibration.
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September 2005
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
September 12 2005
Microelectromechanical device for lateral force calibration in the atomic force microscope: Lateral electrical nanobalance Available to Purchase
Peter J. Cumpson;
Peter J. Cumpson
a)
Quality of Life Division, (DQL),
National Physical Laboratory
, Teddington, United Kingdom
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John Hedley;
John Hedley
Institute for Nanoscale Science and Technology,
University of Newcastle-upon-Tyne
, United Kingdom
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Charles A. Clifford
Charles A. Clifford
Quality of Life Division, (DQL),
National Physical Laboratory
, Teddington, United Kingdom
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Peter J. Cumpson
a)
Quality of Life Division, (DQL),
National Physical Laboratory
, Teddington, United Kingdom
John Hedley
Institute for Nanoscale Science and Technology,
University of Newcastle-upon-Tyne
, United Kingdom
Charles A. Clifford
Quality of Life Division, (DQL),
National Physical Laboratory
, Teddington, United Kingdoma)
Electronic mail: [email protected]
J. Vac. Sci. Technol. B 23, 1992–1997 (2005)
Article history
Received:
November 28 2004
Accepted:
August 01 2005
Citation
Peter J. Cumpson, John Hedley, Charles A. Clifford; Microelectromechanical device for lateral force calibration in the atomic force microscope: Lateral electrical nanobalance. J. Vac. Sci. Technol. B 1 September 2005; 23 (5): 1992–1997. https://doi.org/10.1116/1.2044809
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