We report on optical characteristics as well as electron emission of hydrogen-plasma treated ZnO nanoneedle arrays. The nanoneedle arrays were vertically grown on Si substrates using catalyst-free metalorganic chemical vapor deposition and subsequently treated by hydrogen plasma at room temperature. After hydrogen plasma treatment, the field emission characteristic curves of nanoneedle arrays exhibited significantly reduced turn-on field and increased emission current density, and the electrical conductivity was increased. In addition, low temperature photoluminesence (PL) measurements indicate that a neutral-donor bound exciton PL peak intensity was increased by the hydrogen- plasma treatment. These effects of the plasma treatment on the physical properties may be explained in terms of hydrogen doping effect.
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September 2005
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
September 12 2005
Electrical and optical characteristics of hydrogen-plasma treated ZnO nanoneedles
Jinkyoung Yoo;
Jinkyoung Yoo
National CRI Center for Semiconductor Nanorods and Department of Materials Science and Engineering,
Pohang University of Science and Technology (POSTECH)
, San-31 Hyoja-dong, Pohang, Gyeongbuk 790-784, Korea
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Won Il Park;
Won Il Park
National CRI Center for Semiconductor Nanorods and Department of Materials Science and Engineering,
Pohang University of Science and Technology (POSTECH)
, San-31 Hyoja-dong, Pohang, Gyeongbuk 790-784, Korea
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Gyu-Chul Yi
Gyu-Chul Yi
a)
National CRI Center for Semiconductor Nanorods and Department of Materials Science and Engineering,
Pohang University of Science and Technology (POSTECH)
, San-31 Hyoja-dong, Pohang, Gyeongbuk 790-784, Korea
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a)
Author to whom correspondence should be addressed; electronic mail: [email protected]
J. Vac. Sci. Technol. B 23, 1970–1974 (2005)
Article history
Received:
December 03 2004
Accepted:
July 18 2005
Citation
Jinkyoung Yoo, Won Il Park, Gyu-Chul Yi; Electrical and optical characteristics of hydrogen-plasma treated ZnO nanoneedles. J. Vac. Sci. Technol. B 1 September 2005; 23 (5): 1970–1974. https://doi.org/10.1116/1.2037667
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