Poly(3,4-ethylenedioxythiophene) (PEDOT) and chitosan structures on Si, patterned by plasticizer-assisted imprint lithography (PAIL), are examined under a variety of imprinting conditions. The stabilities of pattern dimension and chemical functionality of these polymers are presented. Thermal annealing for 5min at 80°C is found to be an effective method to stabilize imprinted PEDOT patterns. Biofunctionality in chitosan as a function of imprint temperature and pressure is examined through fluorescence spectroscopy. The accessibility of the amine group of chitosan is observed to decrease for imprint temperatures above 80°C, whereas the chemical functionality is not affected by pressure up to 1MPa. Fluorescence spectra of the chitosan are observed to be strong functions of exposure time to O2 plasma.

1.
S. Y.
Chou
,
P. R.
Krauss
, and
P. J.
Renstrom
,
J. Vac. Sci. Technol. B
14
,
4129
(
1996
).
2.
L.
Tan
,
F.
Wang
,
Y. P.
Kong
,
S. W.
Pang
, and
A. F.
Yee
,
J. Vac. Sci. Technol. B
, these proceedings.
3.
L.
Tan
,
Y. P.
Kong
,
L. R.
Bao
,
X. D.
Huang
,
L. J.
Guo
,
S. W.
Pang
, and
A. F.
Yee
,
J. Vac. Sci. Technol. B
21
,
2742
(
2003
).
4.
X. D.
Huang
,
L. R.
Bao
,
X.
Cheng
,
L. J.
Guo
,
S. W.
Pang
, and
A. F.
Yee
,
J. Vac. Sci. Technol. B
20
,
2872
(
2002
).
5.
L. R.
Bao
,
X.
Cheng
,
X. D.
Huang
,
L. J.
Guo
,
S. W.
Pang
, and
A. F.
Yee
,
J. Vac. Sci. Technol. B
20
,
2881
(
2002
).
6.
T.
Granlund
,
T.
Nyberg
,
L. S.
Roman
,
M.
Svensson
, and
O.
Inganas
,
Adv. Mater. (Weinheim, Ger.)
12
,
269
(
2000
).
7.
C.
Peniche
,
W.
Arguelles-Monal
,
H.
Peniche
, and
N.
Acosta
,
Macromol. Biosci.
3
,
511
(
2003
).
8.
I. M. N.
Vold
,
K. M.
Varum
,
E.
Guibal
, and
O.
Smidsrod
,
Carbohydr. Polym.
54
,
471
(
2003
).
9.
N.
Ozmeric
,
G.
Ozcan
,
C. M.
Haytac
,
E. E.
Alaaddinoglu
,
M. F.
Sargon
, and
S. J.
Senel
,
J. Biomed. Mater. Res.
51
,
500
(
2000
).
10.
N. V.
Kramareva
,
E. D.
Finashina
,
A. V.
Kucherov
, and
L. M.
Kustov
,
Kinet. Katal.
44
,
793
(
2003
).
11.
K.
Sakurai
,
T.
Maegawa
, and
T.
Takahashi
,
Polymer
41
,
7051
(
2000
).
12.
L. R.
Bao
,
L.
Tan
,
X. D.
Huang
,
Y. P.
Kong
,
L. J.
Guo
,
S. W.
Pang
, and
A. F.
Yee
,
J. Vac. Sci. Technol. B
21
,
2749
(
2003
).
13.
H.
Hillborg
,
N.
Tomczak
,
A.
Olah
,
H.
Schonherr
, and
G. J.
Vancso
,
Langmuir
20
,
785
(
2004
).
14.
Molecular Probes Handbook
(
Molecular Probes
, Inc., Eugene, OR,
2004
), http://www.probes.com, 0101.
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