Emission behaviors of Spindt type molybdenum microtip field emitter arrays (Mo-tip FEA) are observed by use of a field-emission electron microscope (FEEM). Individual active micro-tips are separated as bright spots on a phosphor screen. Changes of both total-emission current and emission image are examined by introducing gases, which are nitrogen, hydrogen, methane, and ethylene, respectively. The number rates of active microtips behave differently from the total-emission current. The total-emission current increases during gas introduction, and then gradually decreases after the gas is evacuated. The final current levels are different from gas to gas. Among the gases, ethylene gives the largest final current and the largest number of active microtips. On the contrary, methane decreases in both the final current and the number of active microtips. The emission behaviors for hydrocarbon are different from the nonorganic gases.
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July 2004
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
July 27 2004
Real-time microscopic observation of emission fluctuation on Mo-tip field emitter array caused by introduced gas
K. Minami;
K. Minami
Department of Electrical and Electronic Engineering, Muroran Inst. of Tech., 27-1 Mizumoto-cho, Muroran 050-8585, Japan
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K. Yamane;
K. Yamane
Department of Electrical and Electronic Engineering, Muroran Inst. of Tech., 27-1 Mizumoto-cho, Muroran 050-8585, Japan
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H. Nakane;
H. Nakane
Department of Electrical and Electronic Engineering, Muroran Inst. of Tech., 27-1 Mizumoto-cho, Muroran 050-8585, Japan
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H. Adachi
H. Adachi
Department of Electrical and Electronic Engineering, Muroran Inst. of Tech., 27-1 Mizumoto-cho, Muroran 050-8585, Japan
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J. Vac. Sci. Technol. B 22, 1880–1884 (2004)
Article history
Received:
October 06 2003
Accepted:
May 24 2004
Citation
K. Minami, K. Yamane, H. Nakane, H. Adachi; Real-time microscopic observation of emission fluctuation on Mo-tip field emitter array caused by introduced gas. J. Vac. Sci. Technol. B 1 July 2004; 22 (4): 1880–1884. https://doi.org/10.1116/1.1773843
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