A fabrication process for nanoelectrodes with a nanogap of ∼35 nm is presented. This process is based on controlled placement of carbon nanotubes on metal electrodes using an alternating-current (ac) electric field. One bundle of single-walled nanotubes (SWNT) was placed successfully between two electrodes using an ac electric field. Electrical measurement of the SWNT bundle through the two metal contacts shows nonlinear current-voltage characteristics, similar to those of the two back-to-back Schottky diodes. The nanoelectrodes were fabricated using a single bundle of SWNTs as a shadow mask. The SWNT bundle was suspended on the metal electrodes on top of the photoresist supporter using the ac electric-field alignment. After evaporation of Al and liftoff, nanoelectrodes with a gap of ∼35 nm were successfully obtained. A simple model is proposed which suggests that gaps ranging from 10 to 50 nm can be fabricated through adjustment of the distance from the source to the substrate.
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March 2004
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
March 17 2004
Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field Available to Purchase
Zhi Chen;
Zhi Chen
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
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Wenchong Hu;
Wenchong Hu
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
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Jun Guo;
Jun Guo
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
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Kozo Saito
Kozo Saito
Department of Mechanical Engineering, University of Kentucky, Lexington, Kentucky 40506
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Zhi Chen
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
Wenchong Hu
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
Jun Guo
Department of Electrical and Computer Engineering and Center for Micro-Magnetic and Electronic Devices, University of Kentucky, Lexington, Kentucky 40506
Kozo Saito
Department of Mechanical Engineering, University of Kentucky, Lexington, Kentucky 40506
J. Vac. Sci. Technol. B 22, 776–780 (2004)
Article history
Received:
June 17 2003
Accepted:
February 02 2004
Citation
Zhi Chen, Wenchong Hu, Jun Guo, Kozo Saito; Fabrication of nanoelectrodes based on controlled placement of carbon nanotubes using alternating-current electric field. J. Vac. Sci. Technol. B 1 March 2004; 22 (2): 776–780. https://doi.org/10.1116/1.1689307
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