We report on the measurement of the fringe-to-substrate phase error in our Nanoruler system. This system utilizes scanning beam interference lithography to pattern and measure large-area, nanometer-accuracy gratings that are appropriate for semiconductor and integrated opto-electronic metrology. We present the Nanonruler’s metrology system that is based on digital frequency synthesizers, acousto-optics, and heterodyne phase sensing. It is used to assess the fringe-to-substrate placement stability and the accuracy of the feedback signals. The metrology system can perform measurements in real time, on the fly, and at arbitrary locations on the substrate. Experimental measurements are presented that demonstrate the nanometer-level repeatability of the system. Dominant error sources are highlighted.

1.
M.
Schattenburg
et al.,
J. Vac. Sci. Technol. B
17
,
2638
(
1999
).
2.
International Technology Roadmap for Semiconductors Update, International Technology Roadmap for Semiconductors, http://public.itrs.net, 2002.
3.
P. T. Konkola, Ph.D. dissertation, Massachusetts Institute of Technology, Department of Mechanical Engineering, 2003.
4.
P. T. Konkola et al., Proceedings of the 16th Annual Meeting of the American Society of Precision Engineering (American Society for Precision Engineering, Crystal City, Virginia, 2001).
5.
C. G. Chen, Ph.D. dissertation, Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, 2003.
6.
C. G.
Chen
et al.,
J. Vac. Sci. Technol. B
20
,
3071
(
2002
).
7.
R. K.
Heilmann
et al.,
J. Vac. Sci. Technol. B
19
,
2342
(
2001
).
8.
P. T.
Konkola
,
C. G.
Chen
,
R. K.
Heilmann
, and
M. L.
Schattenburg
,
J. Vac. Sci. Technol. B
18
,
3282
(
2000
).
9.
M.
Suzuki
and
A.
Une
,
J. Vac. Sci. Technol. B
7
,
1971
(
1989
).
10.
K. P.
Birch
and
M. J.
Downs
,
Metrologia
31
,
315
(
1994
).
11.
C. J.
Evans
,
R. J.
Hocken
, and
W. T.
Estler
,
CIRP Ann.
45
,
617
(
1996
).
12.
M. R.
Raugh
,
J. Vac. Sci. Technol. B
15
,
2139
(
1997
).
13.
M. T.
Takac
et al.,
J. Vac. Sci. Technol. B
15
,
2173
(
1997
).
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