Hexagonal polycrystalline boron nitride (BN) films are synthesized on Si substrates by plasma assisted chemical vapor deposition. In the case of the BN films thicker than 20 nm, the turn-on electric field of the electron emission is strongly influenced by the surface roughness rather than the film thickness. On the other hand, in the case of the BN film with a thickness of 8–10 nm, it is found that the turn-on electric field as low as 8.3 V/μm is achieved in spite of the surface of the BN nanofilm being flat as well as the Si substrate. A significant reduction in the effective potential barrier height is suggested. The tunneling controlled field emission is proposed for the BN nanofilm with positive space charge. The BN nanofilm is deposited onto the graphite nanofiber sample. A significant improvement of the field emission characteristics is demonstrated.
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September 2003
This content was originally published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Research Article|
September 23 2003
Electron field emission from boron nitride nanofilm and its application to graphite nanofiber
Chiharu Kimura;
Chiharu Kimura
Department of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Tomohide Yamamoto;
Tomohide Yamamoto
Department of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Shingo Funakawa;
Shingo Funakawa
Department of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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Masaaki Hirakawa;
Masaaki Hirakawa
ULVAC, Inc., 5-9-7 Tohkodai, Tsukuba, Ibaraki 300-2635, Japan
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Hirohiko Murakami;
Hirohiko Murakami
ULVAC, Inc., 5-9-7 Tohkodai, Tsukuba, Ibaraki 300-2635, Japan
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Takashi Sugino
Takashi Sugino
Department of Electrical Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
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J. Vac. Sci. Technol. B 21, 2212–2216 (2003)
Article history
Received:
December 30 2002
Accepted:
July 28 2003
Citation
Chiharu Kimura, Tomohide Yamamoto, Shingo Funakawa, Masaaki Hirakawa, Hirohiko Murakami, Takashi Sugino; Electron field emission from boron nitride nanofilm and its application to graphite nanofiber. J. Vac. Sci. Technol. B 1 September 2003; 21 (5): 2212–2216. https://doi.org/10.1116/1.1612930
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