We investigate an all solid-state thin-film microsupercapacitor (TFSC) fabricated with tungsten cosputtered ruthenium oxide electrodes and LiPON electrolyte. It is shown that the room-temperature charge–discharge behavior of the TFSC is similar to that of a bulk-type supercapacitor. It is also shown that the -based TFSC exhibits a higher discharge specific capacitance and more stable cyclibility, compared with those of the -based TFSC. Based on the pseudocapacitance of the oxide electrodes, the cycling behavior of the TFSCs and tungsten cosputtering effect on the electrochemical properties of TFSCs are described.
REFERENCES
1.
K.
Shokoohi
, J. M.
Tarascon
, and B. J.
Wilkens
, Appl. Phys. Lett.
59
, 1260
(1991
).2.
H.-K.
Kim
, O.-W.
Ok
, T.-Y.
Seong
, E. J.
Jeon
, W. I.
Cho
, and Y. S.
Yoon
, J. Vac. Sci. Technol. A
19
, 2549
(2001
).3.
B. J.
Neudecker
, N. J.
Dudney
, and J. B.
Bates
, J. Electrochem. Soc.
147
, 517
(2001
).4.
J. H.
Lim
, D. J.
Choi
, H.-K.
Kim
, W. I.
Cho
, and Y. S.
Yoon
, J. Electrochem. Soc.
148
, A278
(2001
).5.
H.-K.
Kim
, T.-Y.
Seong
, J. H.
Lim
, W. I.
Cho
, and Y. S.
Yoon
, J. Power Sources
102
, 167
(2001
).6.
H.-K.
Kim
, T.-Y.
Seong
, J. H.
Lim
, W. I.
Cho
, and Y. S.
Yoon
, Kor. J. Mater. Res.
11
, 115
(2001
).7.
B. E. Conway, Electrochemical Supercapacitor (Kluwer/Plenum, New York, 1999).
8.
B. E.
Conway
, V.
Birss
, and J.
Wojtowicz
, J. Power Sources
66
, 1
(1997
).9.
Q. X.
Jia
, S. G.
Song
, X. D.
Wu
, J. H.
Cho
, S. R.
Foltyn
, A. T.
Findikoglu
, and J. L.
Smith
, Appl. Phys. Lett.
68
, 1069
(1996
).10.
K.
Sakiyama
, S.
Onishi
, K.
Ishihara
, K.
Orita
, T.
Kajiyama
, N.
Hosoda
, and T.
Hara
, J. Electrochem. Soc.
140
, 834
(1993
).11.
J. P.
Zheng
, T. R.
Jow
, Q. X.
Jia
, and X. D.
Wu
, J. Electrochem. Soc.
143
, 1068
(1996
).12.
J. P.
Zheng
, P. J.
Cygan
, and T. R.
Jow
, J. Electrochem. Soc.
142
, 2699
(1995
).13.
Y. S.
Yoon
, J. H.
Lim
, D. J.
Choi
, and W. I.
Choi
, J. Power Sources
101
, 126
(2001
).14.
H.-K.
Kim
, Y.-W.
Ok
, T.-Y.
Seong
, J. H.
Lim
, Y. H.
Shin
, W. I.
Cho
, and Y. S.
Yoon
, J. Vac. Sci. Technol. B
20
, 1123
(2002
).15.
H.-K. Kim, T.-Y. Seong, W. I. Cho, Y. H. Shin, and Y. S. Yoon, Proceedings of the International Sensor Conference 2001, p. 101.
16.
17.
P.
Vuoristo
, T.
Mantyla
, P.
Kettunen
, and R.
Lappalainen
, Thin Solid Films
204
, 297
(1991
).18.
E. E.
Khawaja
, F.
Bouamrane
, A. B.
Hallak
, M. A.
Daous
, and M. A.
Salim
, J. Vac. Sci. Technol. A
11
, 580
(1993
).19.
T. J.
Vink
, E. P.
Bonnekamp
, R. G. F. A.
Verbeek
, and Y.
Tamminga
, J. Appl. Phys.
85
, 1540
(1999
).20.
M. E.
Garcia
and S. H.
Garofalini
, J. Electrochem. Soc.
146
, 840
(1999
).21.
22.
H.-K.
Kim
, T.-Y.
Seong
, J. H.
Lim
, W. I.
Cho
, Y. W.
Shin
, and Y. S.
Yoon
, Kor. J. Mater. Res.
11
, 671
(2001
).23.
H.-K. Kim, T.-Y. Seong, J. H. Lim, W. I. Cho, Y. W. Shin, and Y. S. Yoon, Abstracts of 200th Meeting of the Electrochemical Society, San Francisco, CA, 2001, p. 38.
24.
E. B.
Franke
, C. L.
Trimble
, M.
Schubert
, J. A.
Woollam
, and J. S.
Hale
, Appl. Phys. Lett.
77
, 930
(2000
).
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